6 inch n-ụdị sic mkpụrụ

Nkọwa dị mkpirikpi:

6-inch n-ụdị SiC substrate‌ bụ ihe semiconductor ejiri mara site na iji 6-inch wafer size, nke na-abawanye ọnụ ọgụgụ nke ngwaọrụ enwere ike imepụta n'otu wafer n'elu mpaghara buru ibu, si otú ahụ belata ọnụ ahịa ọkwa ngwaọrụ. . Mmepe na ngwa nke 6-inch n-ụdị SiC substrates nwetara uru site na ọganihu nke teknụzụ dị ka usoro uto RAF, nke na-ebelata nkwụsịtụ site na ịkpụ kristal n'akụkụ nkwụsịtụ na ntụziaka ndị yiri ya na kristal na-eto eto, si otú ahụ na-eme ka mma nke mkpụrụ ahụ dịkwuo mma. Ngwa nke mkpụrụ a bara ezigbo uru iji melite nrụpụta nrụpụta yana ibelata ọnụ ahịa ngwaọrụ ike SiC.

 


Nkọwa ngwaahịa

Mkpado ngwaahịa

Silicon carbide (SiC) otu ihe kristal nwere nnukwu oghere obosara (~ Si 3 ugboro), ịdị elu nke thermal conductivity (~ Si 3.3 ugboro ma ọ bụ GaAs ugboro 10), ọnụego mgbanwe saturation elektrọn dị elu (~ Si 2.5 ugboro), ọkụ eletrik dị elu. ubi (~ Si ugboro 10 ma ọ bụ GaAs 5 ugboro) na njirimara ndị ọzọ pụtara ìhè.

Ọgbọ nke atọ semiconductor ihe tumadi gụnyere SiC, GaN, diamond, wdg, n'ihi na ya band ọdịiche obosara (Eg) karịrị ma ọ bụ hà 2.3 electron volts (eV), makwaara dị ka wide band gap semiconductor ihe. E jiri ya tụnyere nke mbụ na nke abụọ ọgbọ semiconductor ihe, ọgbọ nke atọ semiconductor ihe nwere uru nke elu thermal conductivity, elu mmebi eletriki, elu juputara eletrọn Mbugharị ọnụego na elu bonding ike, nke nwere ike izute ọhụrụ chọrọ nke ọgbara ọhụrụ technology electronic maka elu. okpomọkụ, ike dị elu, nrụgide dị elu, ugboro ugboro na nguzogide radieshon na ọnọdụ ndị ọzọ siri ike. Ọ nwere atụmanya ngwa dị mkpa na mpaghara nchekwa mba, ụgbọ elu, ikuku ikuku, nyocha mmanụ, nchekwa anya, wdg, ma nwee ike belata ọnwụ ike karịa 50% n'ọtụtụ ụlọ ọrụ dị mkpa dị ka nkwukọrịta brọdband, ike anyanwụ, nrụpụta ụgbọ ala, semiconductor ọkụ, na smart grid, ma nwee ike ibelata olu akụrụngwa karịa 75%, nke bụ ihe dị mkpa maka mmepe sayensị na teknụzụ mmadụ.

Ike Semicera nwere ike inye ndị ahịa ihe nrụpụta dị elu (Conductive), Semi-insulating (Semi-insulating), HPSI (High Purity Semi-insulating) silicon carbide substrate; Na mgbakwunye, anyị nwere ike inye ndị ahịa akwụkwọ mpempe akwụkwọ nke silicon carbide dị iche iche na nke dị iche iche; Anyị nwekwara ike hazie mpempe akwụkwọ epitaxial dị ka mkpa ndị ahịa si dị, ọ nweghịkwa ọnụọgụ kacha nta.

Nkọwapụta ngwa ahịa bụ isi

Nha

 6-anụ ọhịa
Dayameta 150.0mm + 0mm/-0.2mm
Ntuzi ihu ihu gbanyụọ-axis: 4° chere ihu <1120>±0.5°
Ogologo Flat nke izizi 47.5mm1.5 mm
Nhazi Flat nke izizi <1120>±1.0°
Ụlọ elu nke abụọ Ọ dịghị
Ọkpụrụkpụ 350.0um ± 25.0um
Ụdị poly 4H
Ụdị omume n-ụdị

Nkọwapụta ogo kristal

6-anụ ọhịa
Ihe Ọnụahịa kasị elu nke P-MOS P-SBD ọkwa
Nguzogide 0.015Ω·cm-0.025Ω·cm
Ụdị poly Ọnweghị nke enyere ikike
Njupụta Micropipe ≤0.2/cm2 ≤0.5/cm2
EPD ≤4000/cm2 ≤8000/cm2
TED ≤3000/cm2 ≤6000/cm2
BPD ≤1000/cm2 ≤2000/cm2
TSD ≤300/cm2 ≤1000/cm2
SF (UV-PL-355nm tụrụ) ≤0.5% mpaghara ≤1% mpaghara
Efere hex site na nnukwu ọkụ ọkụ Ọnweghị nke enyere ikike
Ihe ntinye Carbon a na-ahụ anya site na ọkụ dị elu Mpaghara mkpokọta≤0.05%
微信截图_20240822105943

Nguzogide

Ụdị poly

6 lnch n-ụdị sic mkpụrụ (3)
6 lnch n-ụdị sic mkpụrụ (4)

BPD&TSD

6 lnch n-ụdị sic mkpụrụ (5)
SiC wafers

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