Omenala corrosion na-eguzogide porous silicon carbide ceramic Chuck

Nkọwa dị mkpirikpi:

Ụgwọ nke ụlọ ọrụ WeiTai EnergyỤgwọ nke ụlọ ọrụ Technology Co., Ltd.bụ onye na-ebute ụzọ na-eweta ọkachamara na wafer na ihe oriri semiconductor dị elu.Anyị raara onwe anyị nye inye ngwaahịa dị elu, ntụkwasị obi, na ihe ọhụrụ maka nrụpụta semiconductor,ụlọ ọrụ fotovoltaicna mpaghara ndị ọzọ metụtara ya.

Ahịrị ngwaahịa anyị gụnyere ngwaahịa graphite nke SiC / TaC na ngwaahịa seramiiki, gụnyere ihe dị iche iche dị ka silicon carbide, silicon nitride, na aluminum oxide na wdg.

Dị ka onye na-ebubata ntụkwasị obi, anyị ghọtara mkpa ihe oriri na-emepụta na usoro mmepụta ihe, anyị na-agbakwa mbọ na-ebuga ngwaahịa ndị na-agbaso ụkpụrụ kachasị elu iji mezuo mkpa ndị ahịa anyị.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Silicon carbide bụ ụdị ceramik ọhụrụ nwere arụmọrụ dị oke ọnụ yana akụrụngwa akụrụngwa mara mma.N'ihi njirimara dị ka ike dị elu na ike siri ike, oke okpomọkụ na-eguzogide, nnukwu okpomọkụ conductivity na chemical corrosion resistance, Silicon Carbide nwere ike ọ fọrọ nke nta ka ọ ghara iguzogide ọgwụ niile.Ya mere, a na-eji SiC eme ihe na ngwuputa mmanụ, kemịkalụ, igwe na ikuku, ọbụna ike nuklia na ndị agha nwere ihe ha chọrọ na SIC.Ụfọdụ ngwa nkịtị anyị nwere ike ịnye bụ mgbanaka akara maka mgbapụta, valvụ na ihe agha nchebe wdg.

Anyị na-enwe ike chepụta na rụpụta dị ka gị kpọmkwem akụkụ na ezi mma na ezi uche nnyefe oge.

Uru

Nguzogide oxidation dị elu

Nguzogide corrosion mara mma

Ezigbo nguzogide abrasion

Ọnụ ọgụgụ dị elu nke conductivity okpomọkụ

Mmanya onwe onye, obere njupụta

Isi ike dị elu

Nhazi ahaziri ahazi.

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