Omenala SiC mkpuchi graphite heaters maka semiconductor wafers

Nkọwa dị mkpirikpi:

Ụgwọ nke ụlọ ọrụ WeiTai Energy Technology Co., Ltd. bụ onye na-ebute ụzọ nke seramiki semiconductor dị elu yana naanị onye nrụpụta na China nke nwere ike n'otu oge na-enye seramiiki silicon carbide dị ọcha (karịaMegharia ya SiC) na mkpuchi CVD SiC.Na mgbakwunye, ụlọ ọrụ anyị na-agba mbọ maka ubi seramiiki dị ka alumina, aluminum nitride, zirconia, na silicon nitride, wdg.

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Nkọwa ngwaahịa

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Isi atụmatụ nke ikpo ọkụ graphite:

1. uniformity nke kpo oku Ọdịdị.

2. ezigbo ọkụ eletrik na ibu eletrik dị elu.

3. nguzogide corrosion.

4. inoxidizability.

5. elu chemical ịdị ọcha.

6. ike n'ibu ike.

Ihe bara uru bụ ike ịrụ ọrụ nke ọma, uru dị elu na mmezi dị ala.Anyị nwere ike ịmepụta mgbochi-oxidation na ogologo ndụ ogologo oge graphite crucible, graphite ebu na akụkụ niile nke ikpo ọkụ graphite.

Isi ihe nke ikpo ọkụ graphite

Nkọwa nka nka	Semicera-M3
Njupụta nnukwu (g/cm3)	≥1.85
Ọdịnaya Ash (PPM)	≤500
Oke ike ike	≥45
Nguzogide akọwapụtara (μ.Ω.m)	≤12
Ike Flexural (Mpa)	≥40
Ike mkpakọ (Mpa)	≥70
Oke.Nha ọka (μm)	≤43
Ọnụọgụ nke Mgbasa ọkụ Mm/°C	≤4.4*10-6