silicon carbide Ceramic effector maka ịnyefe wafer na usoro semiconductor dị iche iche

Njirimara na uru

1.Precise akụkụ na okpomọkụ kwụsie ike

2.High kpọmkwem stiffness na magburu onwe thermal uniformity, ogologo oge na-eji adịghị mfe ekwe deformation;

3.It nwere ezigbo elu na mma na-eyi nguzogide, si otú ahụ na-ejizi mgbawa ahụ n'enweghị mmerụ ahụ.

4.Silicon carbide resistivity na 106-108Ω, na-abụghị magnetik, n'ahịrị na mgbochi ESD nkọwa nkọwa;Ọ nwere ike igbochi mkpokọta ọkụ eletrik dị n'elu mgbawa

5.Good thermal conductivity, obere mgbasawanye ọnụọgụ.