silicon carbide Ceramic effector maka ịnyefe wafer na usoro semiconductor dị iche iche

Nkọwa dị mkpirikpi:

A na-emepụta ogwe aka silicon carbide site na usoro ntinye nke isostatic ma mee ka ọ dị elu. Dị ka ihe ndị a chọrọ nke eserese imewe nke onye ọrụ si dị, enwere ike imezi nha ndepụta ahụ, nha nha na ọdịdị ya iji mezuo ihe ndị ọrụ chọrọ.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Njirimara na uru

1.Precise akụkụ na okpomọkụ kwụsie ike

2.High kpọmkwem stiffness na magburu onwe thermal uniformity, ogologo oge na-eji adịghị mfe ehulata deformation;

3.It nwere ezigbo elu na mma na-eyi nguzogide, si otú ahụ na-ejizi mgbawa ahụ n'enweghị mmerụ ahụ.

4.Silicon carbide resistivity na 106-108Ω, na-abụghị magnetik, n'ahịrị na mgbochi ESD nkọwa nkọwa; Ọ nwere ike igbochi mkpokọta ọkụ eletrik dị n'elu mgbawa

5.Good thermal conductivity, obere mgbasawanye ọnụọgụ.