Okwu Mmalite nke Silicon Carbide mkpuchi
Ihe mkpuchi mkpuchi anyị nke vapor (CVD) Silicon Carbide (SiC) bụ akwa akwa na-adịgide adịgide ma na-eyi akwa, dị mma maka gburugburu na-achọ nnukwu corrosion na nguzogide okpomọkụ.Ihe mkpuchi silicon CarbideA na-etinye ya n'ígwé dị mkpa n'ụdị dị iche iche site na usoro CVD, na-enye njirimara arụmọrụ dị elu.
Atụmatụ igodo
● - Ịdị Ọcha Pụrụ Iche: Na-anya isi ihe ultra-ọcha mejupụtara nke99.99995%, anyịmkpuchi SiCna-ebelata ihe egwu mmetọ na arụmọrụ semiconductor nwere mmetụta.
● - Nguzogide Kasị Elu: Na-egosiputa ezigbo nguzogide ma iyi na corrosion, na-eme ka ọ bụrụ ihe zuru oke maka ntọala kemịkalụ na plasma siri ike.
● -Elu Thermal Conductivity: Na-eme ka arụ ọrụ a pụrụ ịdabere na ya n'okpuru oke okpomọkụ n'ihi njirimara ọkụ ya pụtara ìhè.
● - Akụkụ kwụsie ike: Na-edobe iguzosi ike n'ezi ihe n'ofe oke okpomọkụ, n'ihi ọnụọgụ mgbasawanye ọkụ ya dị ala.
● -Emere Isi Ike: Na ike ịrị elu nke40 GPA, mkpuchi SiC anyị na-eguzogide mmetụta dị ịrịba ama na abrasion.
● -Emecha elu dị larịị: Na-enye mmecha nke enyo, na-ebelata ọgbọ irighiri ma na-akwalite arụmọrụ arụmọrụ.
Ngwa
Semicera Ihe mkpuchi SiCA na-eji ya n'ụdị dị iche iche nke mmepụta semiconductor, gụnyere:
● -Igwe ọkụ ọkụ LED
● -Mmepụta Polysilicon
● -Semiconductor Crystal Growth
● -Silicon na SiC Epitaxy
● -Oxidation na mgbasa ozi (TO&D)
Anyị na-enye ihe ndị nwere mkpuchi SiC emebere site na graphite isostatic dị elu, carbon fiber-reinforced carbon na 4N silicon carbide recrystallized, ahaziri maka ndị na-eme ihe na-edobe akwa,STC-TCS ntụgharị, CZ unit reflectors, SiC wafer ụgbọ mmiri, SiCwafer paddle, SiC wafer tube, na wafer na-ebu na PECVD, silicon epitaxy, MOCVD usoro..
Uru
● - Ogologo ndụ ogologo: N'ụzọ dị ịrịba ama na-ebelata ngwá ọrụ nkwụsị oge na ụgwọ ọrụ, na-eme ka mmepụta mmepụta ihe zuru ezu.
● -Emelitere Ogo: Na-enweta ebe dị elu dị ọcha dị mkpa maka nhazi semiconductor, si otú a na-akwalite àgwà ngwaahịa.
● -Mbawanye arụmọrụ: Na-eme ka usoro okpomọkụ na CVD dịkwuo mma, na-ebute oge okirikiri dị mkpụmkpụ na mkpụrụ dị elu.
Nkọwa nka nka
● - Ọdịdị: FCC β agba polycrystaline, tumadi (111) gbakwasara
● -Njupụta: 3.21g/cm³
● -isi ike: 2500 Vick siri ike (ibu 500g)
● -Agbajie Ike: 3.0 MPa1/2
● - Ọnụego Mgbasawanye okpomọkụ (100-600 Celsius): 4,3 x 10-6k-1
● -Elastic Modulus(1300 ℃):435 GPA
● -Ọkpụrụkpụ ihe nkiri a na-ahụkarị:100 µm
● -Elu Elu:2-10 µm
Data Dị Ọcha (Ejiri site na Glow Discharge Mass Spectroscopy tụrụ)
| Ihe | ppm | Ihe | ppm |
| Li | <0.001 | Cu | <0.01 |
| Be | <0.001 | Zn | <0.05 |
| Al | <0.04 | Ga | <0.01 |
| P | <0.01 | Ge | <0.05 |
| S | <0.04 | As | <0.005 |
| K | <0.05 | In | <0.01 |
| Ca | <0.05 | Sn | <0.01 |
| Ti | <0.005 | Sb | <0.01 |
| V | <0.001 | W | <0.05 |
| Cr | <0.05 | Te | <0.01 |
| Mn | <0.005 | Pb | <0.01 |
| Fe | <0.05 | Bi | <0.05 |
| Ni | <0.01 |
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