Onye na-ebu SiC dị ọcha dị elu

Ihe osise SiC na-ebu / Susceptor dị ọcha dị elu

Nkọwa dị mkpirikpi:

Silicon carbide bearing disc a makwaara dị ka SIC tray, silicon carbide etching disc, ICP etching disc.Silicon carbide tray maka LED etching (SiC tray) φ600mm bụ ngwa pụrụ iche maka etching silicon miri emi (igwe etching ICP).

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Nkọwa

Silicon carbide ceramics nwere ihe eji arụ ọrụ nke ọma na ụlọ okpomọkụ, dị ka ike dị elu, ike siri ike, modulus dị elu, wdg, ọ nwekwara nkwụsi ike dị elu dị elu dị ka ikuku ikuku dị elu, ọnụọgụ mgbasawanye ọkụ dị ala, yana ezigbo isi ike na ngwa anya. nhazi arụmọrụ.
Ha dabara adaba maka imepụta akụkụ seramiiki ziri ezi maka akụrụngwa sekit agbakwunyere dị ka igwe lithography, nke a na-ejikarị arụpụta ụgbọ mmiri SiC / susceptor, ụgbọ mmiri SiC wafer, diski na-aṅụ, efere mmiri jụrụ oyi, ihe nleba anya nkenke, grating na akụkụ ndị ọzọ seramiiki.

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Uru

High okpomọkụ eguzogide: nkịtị ojiji na 1800 ℃
Igwe ọkụ ọkụ dị elu: dabara na ihe graphite
Isi ike dị elu: isi ike nke abụọ karịa diamond, boron nitride
Nguzogide corrosion: acid siri ike na alkali enweghị corrosion na ya, nguzogide corrosion dị mma karịa tungsten carbide na alumina.
Ibu arọ: obere njupụta, nso aluminom
Enweghị nrụrụ: ọnụọgụ dị ala nke mgbasawanye thermal
Nguzogide ujo okpomọkụ: ọ nwere ike iguzogide mgbanwe okpomọkụ dị nkọ, na-eguzogide ujo, ma nwee arụmọrụ kwụsiri ike
Silicon carbide ụgbọelu dị ka sic etching ụgbọelu, ICP etching susceptor, na-ọtụtụ ebe na-eji na semiconductor CVD, agụụ sputtering wdg Anyị nwere ike inye ndị ahịa na ahaziri wafer na-ebu nke silicon na silicon carbide ihe izute dị iche iche ngwa.

Uru

Ngwongwo	Uru	Usoro
Njupụta	3.21 g/cc	Sink-ese n'elu na akụkụ
Okpomọkụ akọwapụtara	0.66 J/g °K	Igwe ọkụ laser gbara agba
Ike mgbanwe	450 MPa 560 MPa	Ehulata isi 4, isi ihe RT4, 1300°
Mgbaji siri ike	2.94 MPa m1/2	Microindentation
Isi ike	2800	Vicker, ibu 500 g
Modul ModulusYoung's Elastic	450 GPa430	4 pt gbagọọ, RT4 pt gbagọọ, 1300 °C
Nha ọka	2-10 µm	SEM

Nkọwapụta Ụlọ ọrụ

WeiTai Energy Technology Co., Ltd bụ onye na-ebute ụzọ nke seramiki semiconductor dị elu yana naanị onye nrụpụta na China nke nwere ike n'otu oge na-enye seramiiki silicon carbide dị ọcha (karịsịa Recrystallized SiC) na mkpuchi CVD SiC.Na mgbakwunye, ụlọ ọrụ anyị na-agba mbọ maka ubi seramiiki dị ka alumina, aluminum nitride, zirconia, na silicon nitride, wdg.

Isi ngwaahịa anyị gụnyere: silicon carbide etching disc, silicon carbide boat tow, silicon carbide wafer ụgbọ mmiri (Photovoltaic&Semiconductor), silicon carbide furnace tube, silicon carbide cantilever paddle, silicon carbide chucks, silicon carbide beam, yana mkpuchi CVD SiC na TaC mkpuchi.Ngwaahịa ndị a na-ejikarị na semiconductor na ụlọ ọrụ fotovoltaic, dị ka akụrụngwa maka uto kristal, epitaxy, etching, nkwakọ, mkpuchi na ọkụ mgbasa, wdg.
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