Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.
A na-eji mgbanaka mkpuchi tantalum dị elu dị ọcha na akụrụngwa pụrụ iche na sistemu ikuku, kemịkalụ, nrụpụta semiconductor na mpaghara ndị ọzọ. A na-ejikarị ha maka mkpuchi na nnyefe na okpomọkụ dị elu na gburugburu ebe obibi na-emebi emebi, na-enye arụmọrụ a pụrụ ịdabere na ya na ogologo ndụ, na-eme ka arụ ọrụ siri ike nke ngwá ọrụ na àgwà ngwaahịa.
Njirimara nke mgbanaka mkpuchi carbon tantalum dị ọcha bụ ndị a:
1. Nkwụsi ike dị elu: Tantalum carbon mkpuchi mgbanaka dị ọcha nwere ike ịnọgide na-enwe nkwụsi ike nhazi na gburugburu ebe okpomọkụ dị elu ma nwee oke okpomọkụ dị elu, nke kwesịrị ekwesị maka ngwa ndị dị mkpa iji nagide ọnọdụ okpomọkụ dị elu.
2. Nguzogide nrụrụ: Ihe Tantalum n'onwe ya nwere ezigbo nguzogide corrosion, na mkpuchi tantalum carbide nke a na-eme n'elu na-eme ka nkwụsị nke corrosion ya dịkwuo elu ma nwee ike iguzogide mmebi nke ụdị kemịkalụ dị iche iche na ihe mgbaze.
3. Yiri ngbochi: Tantalum carbide mkpuchi nwere ike siri ike ma na-eyi nguzogide, nwere ike ịnọgide na-arụ ọrụ dị mma na esemokwu na gburugburu ebe obibi, na ịgbatị ndụ ọrụ.
4. Ọmarịcha arụ ọrụ mkpuchi: Tantalum carbon mkpuchi mgbanaka dị ọcha na-arụ ọrụ nke ọma, nwere ike igbochi ikuku gas ma ọ bụ mmiri mmiri n'ụzọ dị irè, ma dabara adaba maka ihe ngosi ngwa nwere ihe mkpuchi dị elu.
ya na enweghị TaC
Mgbe iji TaC (n'aka nri)
Ọzọkwa, Semicera'sNgwaahịa ndị nwere mkpuchi TaCna-egosipụta ndụ ọrụ ogologo oge yana nguzogide okpomọkụ dị elu ma e jiri ya tụnyereIhe mkpuchi SiC.Nyocha ụlọ nyocha egosila na anyịIhe mkpuchi TaCnwere ike na-arụ ọrụ mgbe niile na okpomọkụ ruo 2300 degrees Celsius maka ogologo oge. N'okpuru bụ ọmụmaatụ ụfọdụ nke ihe atụ anyị:
