Ihe mkpuchi eserese SiC dị ogologo ndụ maka MOCVD K465i, Igwe ọkụ eserese maka epitaxy

Nkọwa dị mkpirikpi:

A na-eji ihe ndị na-ekpo ọkụ graphite mee ihe na ọkụ ọkụ dị elu na okpomọkụ ruru ogo 2200 na ebe oghere na 3000 degrees na deoxidized na ntinye gas gburugburu.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Nkọwa

A na-eji ihe ndị na-ekpo ọkụ graphite mee ihe na ọkụ ọkụ dị elu na okpomọkụ ruru ogo 2200 na ebe oghere na 3000 degrees na deoxidized na ntinye gas gburugburu.

-59f6c6926c9c7404

ZSDFV

mmexport1569060455717

Isi atụmatụ

1. uniformity nke kpo oku Ọdịdị.
2. ezigbo ọkụ eletrik na ibu eletrik dị elu.
3. nguzogide corrosion.
4. inoxidizability.
5. elu chemical ịdị ọcha.
6. ike n'ibu ike.
Ihe bara uru bụ ike ịrụ ọrụ nke ọma, uru dị elu na mmezi dị ala.
Anyị nwere ike ịmepụta mgbochi-oxidation na ogologo ndụ ogologo oge graphite crucible, graphite ebu na akụkụ niile nke ikpo ọkụ graphite.

XDFvSDc

xvghxvgbn

zdfzdbv

Isi ihe nke ikpo ọkụ graphite

Nkọwa nka nka

VET-M3

Njupụta buru ibu (g/cm3)

≥1.85

Ọdịnaya Ash (PPM)

≤500

Oke ike ike

≥45

Nguzogide akọwapụtara (μ.Ω.m)

≤12

Ike Flexural (Mpa)

≥40

Ike mkpakọ (Mpa)

≥70

Oke. Nha ọka (μm)

≤43

Ọnụọgụ nke Mgbasa ọkụ Mm/°C

≤4.4*10-6

Igwe ọkụ graphite maka ọkụ ọkụ eletrik nwere njirimara nke nguzogide okpomọkụ, nguzogide oxidation, ezigbo eletriki eletrik na ike nrụpụta ka mma. Anyị nwere ike igwe dị iche iche nke graphite kpo oku dị ka ndị ahịa si chepụta.

Ụlọ ọrụ Semicera
Ụlọ ọrụ Semicera 2
Igwe eji eme ihe
Nhazi CNN, nhicha kemịkalụ, mkpuchi CVD
Ụlọ Semicera Ware
Ọrụ anyị

  • Nke gara aga:
  • Osote: