Ngwa nke Silicon Carbide Ceramics na Semiconductor Field

Semiconductors:

Ụlọ ọrụ semiconductor na-agbaso iwu ụlọ ọrụ mmepụta ihe nke "otu ọgbọ nke nkà na ụzụ, otu ọgbọ nke usoro, na otu ọgbọ nke ngwá ọrụ", na nkwalite na iteration nke semiconductor ngwá na-adabere n'ụzọ dị ukwuu na nkà na ụzụ ọganihu nke kpọmkwem akụkụ. N'ime ha, akụkụ seramiiki ziri ezi bụ ihe ndị na-anọchite anya akụkụ akụkụ nkenke nke semiconductor, nke nwere ngwa dị mkpa na usoro njikọ nrụpụta semiconductor dị ka ntinye vapor kemịkalụ, ntinye anụ ahụ, ntinye ion, na etching. Dị ka bearings, ndu rails, linings, electrostatic chucks, n'ibu njikwa ogwe aka, wdg karịsịa n'ime oghere akụrụngwa, ọ na-arụ ọrụ nke nkwado, nchebe, na ntughari.

Kemgbe 2023, Netherlands na Japan ewepụtakwala iwu ọhụrụ ma ọ bụ iwu azụmaahịa mba ofesi na njikwa, na-agbakwunye ụkpụrụ ikike mbupụ maka akụrụngwa semiconductor gụnyere igwe lithography, yana usoro nke mgbochi ụwa niile ejirila nwayọọ nwayọọ pụta. Ihe dị mkpa nke njikwa onwe ya nke eriri ọkọnọ aghọwo ihe a ma ama. Na-eche ihu na-achọ maka localization nke semiconductor akụrụngwa akụkụ, ụlọ ọrụ na-arụsi ọrụ ike na-akwalite ulo oru mmepe. Zhongci Eletrọnịkị achọpụtala mpaghara mpaghara nke teknụzụ dị elu dị ka efere kpo oku na chucks electrostatic, na-edozi nsogbu “bottleneck” nke ụlọ ọrụ akụrụngwa semiconductor; Dezhi New Materials, onye na-eweta ụlọ nke SiC mkpuchi graphite bases na SiC etching rings, emechaala ego nke nde yuan 100, wdg…..
Ihe mejupụtara seramiiki silicon nitride dị elu:

Silicon nitride ceramic substrates na-ejikarị na nkeji ike, ngwaọrụ semiconductor na ndị na-atụgharị ụgbọ ala eletrik dị ọcha (EV) na ụgbọ ala eletrik ngwakọ (HEVs), ma nwee nnukwu ikike ahịa na atụmanya ngwa.

Ugbu a, elu thermal conductivity silicon nitride seramiiki ihe maka ngwa azụmahịa chọrọ thermal conductivity ≥85 W / (m · K), ekwe ike ≥650MPa, na mgbaji siri ike 5 ~ 7MPa·m1 / 2. Companieslọ ọrụ ndị nwere ikike n'ezie na-emepụta ihe dị elu nke ikuku thermal conductivity silicon nitride seramiiki bụ tumadi Toshiba Group, Hitachi Metals, Japan Electric Chemical, Japan Maruwa na Japan Fine Ceramics.

Nnyocha ụlọ n'ime ihe ndị dị na seramiiki silicon nitride enwewokwa ọganihu ụfọdụ. Thermal conductivity nke silicon nitride seramiiki mkpụrụ kwadebere site teepu-nkedo usoro nke Beijing Alaka Sinoma High-Tech Nitride Ceramics Co., Ltd. bụ 100 W / (m·K); Beijing Sinoma Artificial Crystal Research Institute Co., Ltd. akwadola nke ọma silicon nitride seramiiki mkpụrụ nwere ike na-ehulata nke 700-800MPa, mgbaji siri ike ≥8MPa·m1 / 2, yana ikuku ikuku ≥80W/(m·K) site n'ịkwalite usoro na nhazi usoro.