Njikwa nke radial resistivity uniformity n'oge adọkpụrụ kristal

Isi ihe na-emetụta ịdị n'otu nke radial resistivity nke otu kristal bụ flatness nke interface mmiri siri ike na obere mmetụta ụgbọ elu n'oge uto kristal.

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Mmetụta nke flatness nke ihe siri ike-mmiri interface N'oge kristal ibu, ma ọ bụrụ na agbaze na-akpali akpali even, the hà eguzogide n'elu bụ ihe siri ike-mmiri interface (ihe na-adịghị ọcha ịta na gbazee dị iche iche na adịghị ọcha ịta na crystal, otú ahụ. resistivity dị iche iche, na nguzogide bụ nhata naanị na interface siri ike-mmiri). Mgbe adịghị ọcha K <1, interface convex na gbazee ga-eme ka radial resistivity dị elu n'etiti na ala na nsọtụ, mgbe interface concave na gbazee bụ ihe na-abụghị. The radial resistivity uniformity nke larịị siri ike-mmiri interface ka mma. A na-ekpebi ọdịdị nke interface mmiri siri ike n'oge ịdọrọ kristal site na ihe ndị dị ka nkesa ebe okpomọkụ na oke ọrụ kristal na-arụ ọrụ. N'ime otu kristal a dọtara kwụ ọtọ, ọdịdị nke elu mmiri siri ike bụ nsonaazụ nke ngwakọta nke ihe ndị dị ka nkesa ọkụ ọkụ na ikpo ọkụ kristal.

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Mgbe ị na-adọkpụ kristal, enwere ụdị mgbanwe ọkụ anọ dị na interface mmiri siri ike:

Okpomọkụ na-adịghị mma nke mgbanwe nke oge ewepụtara site na nkwụsi ike silicon a wụrụ awụ

Okpomọkụ conduction nke gbazee

Ntugharị ọkụ na-agbago elu site na kristal

Ọkụ na-ekpo ọkụ n'èzí site na kristal
The latent okpomọkụ bụ otu maka dum interface, na size adịghị agbanwe agbanwe mgbe uto na-adịgide adịgide. (Nduzi okpomọkụ ngwa ngwa, jụrụ oyi ngwa ngwa, yana ọnụ ọgụgụ siri ike na-abawanye)

Mgbe isi nke kristal na-eto eto dị nso na mkpanaka mkpụrụ osisi kristal mmiri jụrụ oyi nke otu ọkụ kristal, gradient okpomọkụ dị na kristal buru ibu, nke na-eme ka ntụgharị ọkụ ogologo oge nke kristal dị elu karịa okpomọkụ radieshon, ya mere, ihe siri ike-mmiri interface convex ka gbazee.

Mgbe kristal na-etolite n'etiti, ntụgharị ọkụ ogologo oge na-ekpo ọkụ na-ekpo ọkụ n'elu, ya mere interface ahụ kwụ ọtọ.

Na ọdụ nke crystal, ogologo okpomọkụ conduction bụ ihe na-erughị elu radieshon okpomọkụ, na-eme ka ihe siri ike-mmiri interface concave na gbazee.
Iji nweta otu kristal nwere otu radial resistivity, a ga-edorịrị interface nke mmiri siri ike.
Ụzọ ndị a na-eji bụ: ①Hazie usoro ikpo ọkụ kristal iji belata gradient radial okpomọkụ nke ebe okpomọkụ.
② Gbanwee paramita ọrụ ịdọrọ kristal. Dịka ọmụmaatụ, maka convex interface na agbaze, welie ọsọ ịdọrọ iji bulie ọnụego kristal siri ike. N'oge a, n'ihi na-abawanye na crystallization latent okpomọkụ tọhapụrụ na interface, na-agbaze okpomọkụ nso interface na-abawanye, na-eme ka agbaze nke akụkụ nke crystal na interface, na-eme ka interface dị larịị. N'ụzọ megidere nke ahụ, ọ bụrụ na interface nke na-eto eto na-agbaze n'ebe gbazee, ọ nwere ike ibelata ọnụego uto, na agbaze ahụ ga-eme ka olu kwekọrọ na ya sie ike, na-eme ka interface ahụ dị larịị.
③ Gbanwee ọsọ ntụgharị nke kristal ma ọ bụ crucible. Ịbawanye ọsọ ntụgharị kristal ga-eme ka mmiri mmiri na-ekpo ọkụ dị elu na-aga site na ala ruo n'elu na interface mmiri siri ike, na-eme ka interface ahụ gbanwee site na convex gaa na concave. Ntuziaka nke mmiri mmiri na-asọba na-eme site na ntụgharị nke crucible bụ otu ihe ahụ nke convection eke, na mmetụta ya kpamkpam na-emegide nke ntụgharị kristal.
④ Ịbawanye ogo nke n'ime ime nke crucible na dayameta nke kristal ga-eme ka ihe mgbagwoju anya nke mmiri siri ike, ma nwee ike ibelata nkwụsịtụ nkwụsị na ikuku oxygen na kristal. N'ozuzu, ndị crucible dayameta: crystal dayameta = 3 ~ 2.5: 1.
Mmetụta nke obere mmetụta ụgbọelu
Igwe mmiri siri ike nke uto kristal na-atụgharịkarị n'ihi njedebe nke isotherm gbazee na crucible. Ọ bụrụ na a na-ebuli kristal ngwa ngwa n'oge uto kristal, obere ụgbọ elu dị larịị ga-apụta na interface mmiri siri ike nke (111) germanium na silicon single crystals. Ọ bụ ụgbọ elu (111) atomịk juru n'ọnụ, nke a na-akpọkarị obere ụgbọ elu.
Ntinye uche na-adịghị ọcha na mpaghara obere ụgbọ elu dị nnọọ iche na nke dị na mpaghara ụgbọ elu na-abụghị obere. Ihe omume a nke nkesa adịghị mma nke adịghị ọcha na mpaghara obere ụgbọ elu ka a na-akpọ mmetụta obere ụgbọ elu.
N'ihi obere mmetụta ụgbọ elu, nkwụsị nke obere mpaghara ụgbọ elu ga-ebelata, na n'ọnọdụ siri ike, eriri ọkpọkọ adịghị ọcha ga-apụta. Iji kpochapụ radial resistivity inhomogeneity kpatara site na obere mmetụta ụgbọ elu, ihe siri ike-mmiri interface kwesịrị ka larịị.

Nabata ndị ahịa ọ bụla si n'akụkụ ụwa niile ka ha bịa leta anyị maka mkparịta ụka ọzọ!

https://www.semi-cera.com/
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https://www.semi-cera.com/cvd-coating/


Oge nzipu: Jul-24-2024