Kedu ihe bụ CVD SiC
Kemịkalụ vapor deposition (CVD) bụ usoro ntinye oghere eji emepụta ihe siri ike dị oke ọcha. A na-ejikarị usoro a eme ihe na mpaghara mmepụta semiconductor iji mepụta ihe nkiri dị mkpa n'elu wafers. N'ime usoro ịkwadebe SiC site na CVD, a na-ekpughe mkpụrụ osisi ahụ n'otu ụzọ ma ọ bụ karịa na-agbanwe agbanwe, nke na-emeghachi kemịkalụ n'elu nke mkpụrụ iji tinye nkwụnye ego SiC chọrọ. N'ime ọtụtụ ụzọ maka ịkwadebe ihe SiC, ngwaahịa ndị a kwadebere site na nsị vapor kemịkalụ nwere oke nha na ịdị ọcha, na usoro ahụ nwere njikwa usoro siri ike.
Ihe CVD SiC dị ezigbo mma maka iji ya na ụlọ ọrụ semiconductor nke chọrọ ihe arụ ọrụ dị elu n'ihi nchikota pụrụ iche nke ezigbo ọkụ, ọkụ eletrik na kemịkal. A na-ejikarị CVD SiC eme ihe na etching akụrụngwa, MOCVD akụrụngwa, Si epitaxial equipment and SiC epitaxial equipment, ngwa ngwa okpomọkụ nhazi ngwa na ubi ndị ọzọ.
N'ozuzu, akụkụ ahịa kachasị ukwuu nke CVD SiC components bụ etching akụrụngwa akụrụngwa. N'ihi mmeghachi omume ya dị ala na mmegharị ya na chlorine- na fluorine nwere etching gas, CVD silicon carbide bụ ihe dị mma maka ihe ndị dị ka mgbanaka mgbanaka na ngwa etching plasma.
CVD silicon carbide components na etching equipment gụnyere mgbanaka mgbanaka, isi mmiri ịsa gas, trays, mgbanaka ihu, wdg. Were mgbanaka mgbanaka dị ka ihe atụ, mgbanaka mgbanaka bụ ihe dị mkpa etinyere n'èzí wafer na ozugbo na kọntaktị na wafer. Site n'itinye voltaji na mgbanaka iji lekwasị anya na plasma na-agafe na mgbanaka ahụ, plasma na-elekwasị anya na wafer iji meziwanye nhazi nhazi.
A na-eji silicon ma ọ bụ quartz mee mgbanaka mgbanaka ọdịnala. Site na ọganihu nke miniaturization sekit agbakwunyere, ọchịchọ na mkpa nke usoro etching na mmepụta sekit agbakwunyere na-abawanye, ike na ike nke etching plasma na-aga n'ihu na-abawanye. Karịsịa, ike plasma achọrọ na akụrụngwa etching plasma capacitively jikọtara (CCP) dị elu, yabụ ọnụọgụ mgbanaka mgbanaka ejiri ihe silicon carbide na-abawanye. Eserese eserese nke CVD silicon carbide mgbanaka mgbanaka n'okpuru:
Oge nzipu: Jun-20-2024