Nke mbụ, tinye silicon polycrystalline na dopants n'ime crucible quartz n'ime otu ọkụ kristal, mee ka okpomọkụ dị elu karịa ogo 1000, wee nweta silicon polycrystalline na steeti a wụrụ awụ.
Silicon ingot uto bụ usoro ime silicon polycrystalline ka ọ bụrụ otu silicon kristal. Mgbe silicon polycrystalline na-ekpo ọkụ n'ime mmiri mmiri, a na-achịkwa gburugburu ebe okpomọkụ ka ọ bụrụ otu kristal dị elu.
Echiche ndị emetụtara:
Otu uto kristal:Mgbe okpomọkụ nke polycrystalline silicon ngwọta kwụsiri ike, mkpụrụ kristal na-eji nwayọọ nwayọọ gbadaa n'ime silicon gbazee (mkpụrụ kristal ga-agbazekwa na silicon gbazee), mgbe ahụ, a na-ebuli mkpụrụ kristal elu n'otu ọsọ maka mkpụrụ. usoro. Mgbe ahụ, a na-ewepụ ihe ndị a na-emepụta n'oge usoro mkpụrụ site na ọrụ olu. Mgbe olu na-agbaji n'ogologo zuru oke, a na-abawanye dayameta nke otu silicon kristal na ọnụ ahịa ebumnuche site n'ịgbanwe ọsọ na-adọta na okpomọkụ, mgbe ahụ, a na-edobe nha nhata ka ọ na-eto ruo ogologo oge. N'ikpeazụ, iji gbochie nkwụsịtụ ahụ ka ọ ghara ịlaghachi azụ, a na-emecha otu kristal ingot iji nweta otu kristal chara acha, wee wepụ ya mgbe okpomọkụ dị jụụ.
Ụzọ maka ịkwadebe otu silicon kristal:Usoro CZ na usoro FZ. A na-akpọbiri usoro CZ dị ka usoro CZ. Ihe e ji mara nke usoro CZ bụ na a na-achịkọta ya na usoro okpomọkụ nke cylinder kwụ ọtọ, na-eji graphite na-eguzogide okpomọkụ iji gbazee silicon polycrystalline na akwa quartz dị ọcha, wee tinye kristal mkpụrụ n'ime ebe gbazere maka ịgbado ọkụ, mgbe ahụ. na-atụgharị mkpụrụ kristal, wee tụgharịa crucible ahụ. A na-ebuli mkpụrụ kristal ahụ nwayọ elu, ma mgbe usoro nke ịgha mkpụrụ, ịgbasawanye, ntụgharị ubu, uto dayameta nha na ọdụ ọdụ, a na-enweta otu silicon kristal.
Usoro mgbaze nke mpaghara bụ usoro iji polycrystalline ingots agbaze na kristal kristal semiconductor na mpaghara dị iche iche. A na-eji ike ọkụ na-emepụta mpaghara agbaze n'otu njedebe nke mkpanaka semiconductor, mgbe ahụ, a na-agbakọta otu mkpụrụ kristal. A na-edozi ọnọdụ okpomọkụ iji mee ka mpaghara mgbaze ahụ jiri nwayọọ nwayọọ na-aga na njedebe nke ọzọ nke mkpanaka ahụ, na site na mkpanaka dum, otu kristal na-eto eto, na ntụgharị kristal bụ otu ihe ahụ nke mkpụrụ osisi kristal. A na-ekewa usoro ịgbaze mpaghara ụzọ abụọ: usoro mgbaze mpaghara kwụ ọtọ na usoro ịgbaze mpaghara kwụsiri ike. A na-ejikarị nke mbụ eme ihe maka ịsacha na otu uto kristal nke ihe dịka germanium na GaAs. Nke ikpeazụ bụ iji eriri igwe dị elu na ikuku ma ọ bụ ọkụ na-ekpo ọkụ iji mepụta mpaghara a wụrụ awụ na kọntaktị dị n'etiti otu mkpụrụ kristal na mkpanaka silicon polycrystalline kwụsịtụrụ n'elu ya, wee bugharịa mpaghara a wụrụ awụ elu ka ọ too otu otu. kristal.
A na-emepụta ihe dị ka 85% nke silicon wafers site na usoro Czochralski, na 15% nke silicon wafer na-emepụta site na mpaghara agbaze mpaghara. Dị ka ngwa, otu kristal kristal toro site Czochralski usoro bụ tumadi na-eji na-emepụta integrated sekit components, ebe otu kristal kristal toro site na mpaghara agbaze usoro bụ tumadi eji maka ike semiconductor. Usoro Czochralski nwere usoro tozuru okè ma dị mfe na-eto eto nnukwu dayameta otu silicon kristal; usoro mgbaze nke mpaghara anaghị akpọtụrụ akpa ahụ, ọ naghị adị mfe mmetọ, nwere ịdị ọcha dị elu, ọ dịkwa mma maka imepụta ngwaọrụ elektrọnik dị elu, mana ọ na-esiri ike itolite nnukwu dayameta otu silicon silicon, na a na-ejikarị naanị maka sentimita asatọ ma ọ bụ ihe na-erughị ya na dayameta. Vidiyo na-egosi usoro Czochralski.
N'ihi na ihe isi ike na ịchịkwa dayameta nke otu kristal silicon mkpanaka na usoro nke Anam Udeme otu crystal, iji nweta silicon mkpara nke ọkọlọtọ diameters, dị ka 6 sentimita asatọ, 8 sentimita asatọ, 12 sentimita asatọ, wdg Mgbe ịdọrọ otu. kristal, dayameta nke silicon ingot ga-atụgharị na ala. Elu nke mkpanaka silicon mgbe ị na-atụgharị na-adị mma na njehie nha dị ntakịrị.
N'iji teknụzụ ịkpụ waya dị elu, a na-egbutu otu kristal ingot n'ime wafer silicon nke ọkpụrụkpụ dabara adaba site na ngwa slicing.
N'ihi obere ọkpụrụkpụ nke silicon wafer, nsọtụ nke silicon wafer mgbe ịchachara dị nkọ. Ebumnobi nke ichikota onu bụ ime ka ihu dị nro ma ọ dịghị mfe imebi n'ichepụta mgbawa n'ọdịnihu.
LAPPING bụ ịgbakwunye wafer n'etiti efere nhọrọ dị arọ na efere kristal dị ala, ma tinye nrụgide ma tụgharịa na abrasive iji mee ka wafer dị larịị.
Etching bụ usoro iji wepu mmebi elu nke wafer, na oyi akwa nke mebiri site na nhazi anụ ahụ na-agbaze site na ngwọta kemịkal.
Egweri akụkụ abụọ bụ usoro iji mee ka wafer dị mma ma wepụ obere ihe n'elu.
RTP bụ usoro nke na-ekpo ọkụ ọkụ ọkụ ngwa ngwa n'ime sekọnd ole na ole, nke mere na ntụpọ dị n'ime nke wafer ahụ dị n'otu, a na-egbochi ihe ndị na-adịghị mma nke ígwè, na-egbochi ọrụ na-adịghị mma nke semiconductor.
Ntucha bụ usoro na-eme ka ọ dị ire ụtọ n'elu site na nhazi nke ọma n'elu. Iji polishing slurry na polishing ákwà, jikọtara na kwesịrị ekwesị okpomọkụ, nrụgide na adiana ọsọ, nwere ike iwepụ n'ibu mmebi oyi akwa hapụrụ site aga usoro na nweta silicon wafers na magburu onwe elu flatness.
Ebumnuche nke ihicha bụ iji wepụ ihe ndị na-emepụta ihe, ihe ndị dị n'ime ya, ọla, wdg fọdụrụ n'elu nke silicon wafer mgbe polishing, iji hụ na ịdị ọcha nke silicon wafer elu na izute àgwà chọrọ nke ụdi usoro.
The flatness & resistivity tester achọpụtara silicon wafer mgbe polishing na ihicha iji hụ na ọkpụrụkpụ, flatness, mpaghara flatness, curvature, warpage, resistivity, wdg nke polished wafer na-egbo mkpa ndị ahịa.
IHE NDỊ NA-ECHICHE bụ usoro iji nyochaa nke ọma n'elu wafer, na ntụpọ elu na ọnụọgụ na-ekpebi site na mgbasa laser.
EPI GROWING bụ usoro maka itolite ihe nkiri silicon otu kristal dị elu na wafer silicon a na-egbu maramara site na ntinye kemịkalụ vapor.
Echiche ndị emetụtara:Uto Epitaxial: na-ezo aka na uto nke otu oyi akwa kristal nwere ụfọdụ ihe a chọrọ yana otu nghazi kristal dị ka mkpụrụ n'otu mkpụrụ kristal (substrate), dịka kristal mbụ na-agbatị n'èzí maka akụkụ. E mepụtara teknụzụ uto epitaxial na ngwụcha afọ 1950 na mmalite 1960s. N'oge ahụ, iji rụpụta elu-ugboro na elu-ike ngwaọrụ, ọ dị mkpa iji belata onye na-anakọta usoro nguzogide, na ihe a chọrọ ka iguzogide elu voltaji na elu ugbu a, n'ihi ya, ọ dị mkpa na-eto eto a mkpa dị elu. oyi akwa epitaxial na-eguzogide na mkpụrụ na-eguzogide obere. Ọhụrụ otu kristal oyi akwa toro epitaxially nwere ike ịdị iche na mkpụrụ n'usoro nke conductivity ụdị, resistivity, wdg, na multi-layer otu kristal nke dị iche iche ọkpụrụkpụ na chọrọ nwekwara ike toro, si otú imeziwanye mgbanwe nke ngwaọrụ imewe na arụmọrụ nke ngwaọrụ.
Nkwakọ ngwaahịa bụ nkwakọ ngwaahịa ikpeazụ ruru eru.
Oge nzipu: Nov-05-2024