N'ihu njedebe nke ahịrị (FEOL): Ịtọ ntọala

N'ihu, n'etiti na azụ njedebe nke semiconductor mmepụta ahịrị

Enwere ike kewaa usoro nrụpụta semiconductor n'ụzọ atọ:
1) N'ihu njedebe nke ahịrị
2) Mid njedebe nke ahịrị
3) Nkwụsị azụ nke ahịrị

Anyị nwere ike iji ntụnye dị mfe dị ka iwulite ụlọ iji nyochaa usoro mgbagwoju anya nke nrụpụta mgbawa:

N'ihu njedebe nke eriri mmepụta dị ka ịtọ ntọala na iwu mgbidi nke ụlọ. N'ichepụta semiconductor, ọkwa a gụnyere ịmepụta ihe ndị bụ isi na transistor na wafer silicon.

Nzọụkwụ ndị bụ isi nke FEOL:

1.Cleaning: Malite na obere silicon wafer ma hichaa ya iji wepụ ihe ọ bụla adịghị ọcha.
2.Oxidation: Too oyi akwa nke silicon dioxide na wafer iji kewapụ akụkụ dị iche iche nke mgbawa.
3.Photolithography: Jiri fotolithography tinye ụkpụrụ n'elu wafer, dị ka ịse ihe osise na ìhè.
4.Etching: Wepụ silicon dioxide na-achọghị iji kpughee ụkpụrụ achọrọ.
5.Doping: Webata adịghị ọcha n'ime silicon iji gbanwee ihe ọkụ eletrik ya, na-emepụta transistor, ihe ndị bụ isi ụlọ nke mgbawa ọ bụla.

Ọkara njedebe nke ahịrị (MEOL): Ijikọ ntụpọ

N'etiti njedebe nke ahịrị mmepụta dị ka ịwụnye wiring na plumbing n'ime ụlọ. Ogbo a gbadoro anya n'ịmepụta njikọ n'etiti transistor emepụtara na ọkwa FEOL.

Nzọụkwụ ndị bụ isi nke MEOL:

1.Dielectric Deposition: Nkwụnye ego mkpuchi mkpuchi (nke a na-akpọ dielectrics) iji chebe transistor.
2.Contact Formation: Ụdị kọntaktị iji jikọọ transistor na ibe ya na ụwa dị n'èzí.
3.Interconnect: Tinye akwa metal iji mepụta ụzọ maka akara eletriki, dị ka wiwi ụlọ iji hụ na ike na-enweghị ntụpọ na data data.

Ọgwụgwụ nke ahịrị (BEOL): Mmecha mmecha

Azụ azụ nke ahịrị mmepụta ahụ dị ka ịgbakwunye mmetụ ikpeazụ na ụlọ-ịwụnye ihe ndozi, eserese, na ịhụ na ihe niile na-arụ ọrụ. N'imepụta semiconductor, ọkwa a gụnyere ịgbakwunye ọkwa ikpeazụ na ịkwadebe mgbawa maka nkwakọ ngwaahịa.

Nzọụkwụ ndị bụ isi nke BEOL:

1.Additional Metal Layers: Tinye otutu ihe eji eme ihe iji kwalite mmekorita, na-eme ka mgbawa ahụ nwee ike ijikwa ọrụ mgbagwoju anya na ọsọ ọsọ.
2.Passivation: Tinye akwa mkpuchi iji chebe mgbawa na mmebi gburugburu ebe obibi.
3.Testing: Isiokwu mgbawa na ule siri ike iji hụ na ọ na-ezute nkọwa niile.
4.Dicing: Beechapụ wafer n'ime ibe ọ bụla, nke ọ bụla dị njikere maka nkwakọ na iji na ngwaọrụ eletrọnịkị.

Semicera bụ onye nrụpụta OEM na-eduga na China, raara onwe ya nye inye ndị ahịa anyị uru pụrụ iche. Anyị na-enye ngwaahịa na ọrụ dị elu nke ukwuu, gụnyere:

1.CVD SiC mkpuchi(Epitaxy, akụkụ mkpuchi CVD omenala, mkpuchi arụmọrụ dị elu maka ngwa semiconductor, na ndị ọzọ)
2.CVD SiC nnukwu akụkụ(Etch mgbanaka, mgbanaka mgbanaka, ihe SiC omenala maka akụrụngwa semiconductor, na ndị ọzọ)
3.Akụkụ CVD TaC mkpuchi(Epitaxy, SiC wafer uto, ngwa okpomọkụ dị elu, na ndị ọzọ)
4.Akụkụ eserese(Ụgbọ mmiri eserese, ngwa graphite omenala maka nhazi oke okpomọkụ, na ndị ọzọ)
5.Akụkụ SiC(Ụgbọ mmiri SiC, ọkpọkọ ọkụ SiC, akụrụngwa SiC omenala maka nhazi ihe dị elu, na ndị ọzọ)
6.Akụkụ Quartz(Ụgbọ mmiri Quartz, akụkụ quartz omenala maka ụlọ ọrụ semiconductor na anyanwụ, na ndị ọzọ)

Nkwenye anyị maka ịdị mma na-eme ka anyị na-enye ihe ngwọta ọhụrụ na nke a pụrụ ịdabere na ya maka ụlọ ọrụ dị iche iche, gụnyere mmepụta semiconductor, nhazi ihe dị elu, na ngwa teknụzụ dị elu. Na-elekwasị anya na nkenke na ịdị mma, anyị raara onwe anyị nye iji gboo mkpa pụrụ iche nke onye ahịa ọ bụla.