Okwu mmalite nke semiconductor-ọkwa enyo mkpuchi carbon

I. Okwu mmalite nke enyo Ọdịdị carbon

Njirimara:

(1) N'elu nke ugogbe anya carbon dị nro ma nwee nhazi enyo;

(2) Glassy carbon nwere nnukwu ike ike na obere uzuzu ọgbọ;

(3) Glassy carbon nwere ọnụ ahịa ID / IG buru ibu na ọkwa dị ala nke graphitization, yana arụmọrụ mkpuchi ọkụ ya ka mma;

(4) Glassy carbon bụ carbon siri ike-graphitize nke nwere ezigbo nkwụsi ike dị elu na nkwụsi ike na okpomọkụ dị elu;

(5) Glassy carbon nwere obere mmeghachi omume dị n'elu ebe yana ezigbo nguzogide corrosion kemịkalụ, ma na-eguzogide ọgwụ ikuku site na ikuku oxygen, silicon, wdg.

II. Okwu mmalite nke mkpuchi carbon enyo

A na-ekesa oghere dị n'elu nke mkpuchi graphite flake na ihe owuwu ahụ tọgbọrọ chakoo, ebe nhazi nke mkpuchi carbon enyo siri ike ma ghara ịdaba!

1. Anti-oxidation arụmọrụ nke glassy carbon mkpuchi

(1)Laminated ike chere
Glassy carbon mkpuchi n'ụzọ dị irè na-eme ka mgbochi oxidation arụmọrụ nke ike mmetụta;

(2)Short eriri ike chere
The n'ozuzu mmetụta nwere a elu porosity na-enye oxygen ọwa; mkpuchi flake graphite nwere usoro rụrụ arụ, ọwa ikuku oxygen dị ole na ole, yana arụmọrụ mgbochi oxidation ka mma; mkpuchi carbon nke enyo enyo nwere nnukwu usoro, ọwa ikuku oxygen dị ole na ole, yana arụmọrụ kacha mma na-egbochi oxidation.

2. Nkwụsi ike dị elu nke mkpuchi carbon enyo megide ablation
Ọdịdị porous nke larịị chere nwere ike belata okpomọkụ (okpomọkụ convection okpomọkụ dissipation); akwụkwọ graphite na-adịkarị mfe ịnya ọnya mgbe a na-ewepụ ya; ihe omimi nke ablation nke mkpuchi carbon enyo bụ nke kachasị njọ, na nkwụsị nkwụsị ya bụ nke kachasị ike; mkpuchi carbon nke enyo nwere ezigbo mkpuchi mkpuchi ọkụ.

3. Anti-Si ozision arụmọrụ nke glassy carbon mkpuchi
Mkpirisi eriri ike chere na-emebisị na ntụ ntụ site na Si; flake graphite mkpuchi nwere iguzogide Si ozize na obere oge; mkpuchi carbon enyo enyo nwere arụmọrụ mgbochi ikuku kacha mma.

Isi ihe kpatara Si erosion bụ na Si gasification ozugbo na-emebi elu nke ike chere, na-akpata powderization; ebe usoro carbon nke mkpuchi carbon glassy na-akwụsi ike ma nwee arụmọrụ mgbochi ikuku ka mma.

Nchịkọta

A naghị eji usoro mkpuchi carbon carbon enyo naanị na ihe mkpuchi ọkụ, mana a na-atụkwa anya na a ga-eji ya ozugbo n'elu akụkụ graphite naAkụkụ C/C, na-emeziwanye arụmọrụ ọrụ zuru oke nke ihe ahụ.