Ọnọdụ ọhụrụ na ụlọ ọrụ Semiconductor: Ngwa nke teknụzụ mkpuchi mkpuchi

Ụlọ ọrụ semiconductor na-ahụ ọganihu na-enwetụbeghị ụdị ya, karịsịa na mpagharasilicon carbide (SiC)ike eletrọnịkị.Na ọtụtụ nnukwu-ọnụ ọgụgụwaferA na-ewu ụlọ ma ọ bụ mgbasawanye iji gboo mkpa na-arịwanye elu nke ngwaọrụ SiC na ụgbọ ala eletrik, ọganihu a na-enye ohere dị ịrịba ama maka uto uru.Agbanyeghị, ọ na-ewetakwa ihe ịma aka pụrụ iche nke na-achọ ihe ngwọta ọhụrụ.

N'ime obi nke ịba ụba nke mgbawa SiC zuru ụwa ọnụ bụ imepụta kristal SiC dị elu, wafers na akwa epitaxial.Ebe a,semiconductor-ọkwa graphiteihe na-arụ ọrụ dị mkpa, na-eme ka uto SiC kristal na ntinye nke ọkwa SiC epitaxial.Mkpuchi ọkụ na inertness nke Graphite na-eme ka ọ bụrụ ihe kacha amasị, nke ejiri ya na crucibles, pedestals, disks planetary, na satịlaịtị n'ime uto kristal na sistemụ epitaxy.Ka o sina dị, ọnọdụ usoro ahụ siri ike na-ebute nnukwu ihe ịma aka, na-eduga n'ibelata ngwa ngwa nke ihe ndị dị na graphite ma mechaa gbochie mmepụta nke kristal SiC dị elu na akwa epitaxial.

Mmepụta kristal silicon carbide na-agụnye ọnọdụ usoro siri ike, gụnyere okpomọkụ karịrị 2000 Celsius C yana ihe na-emebi emebi nke ukwuu.Nke a na-ebutekarị mbibi zuru oke nke graphite crucibles mgbe ọtụtụ usoro usoro, si otú ahụ na-abawanye ọnụ ahịa mmepụta.Na mgbakwunye, ọnọdụ ndị siri ike na-agbanwe ihe ndị dị n'elu nke akụrụngwa graphite, na-emebi nkwughachi na nkwụsi ike nke usoro mmepụta.

Iji luso ihe ịma aka ndị a ọgụ nke ọma, teknụzụ mkpuchi mkpuchi apụtala dị ka ihe na-agbanwe egwuregwu.Ihe mkpuchi mkpuchi dabere naTantalum carbide (TaC)ewebatala iji leba anya n'okwu gbasara mmebi akụrụngwa graphite na ụkọ ọkọnọ graphite.Ihe TaC na-egosipụta okpomọkụ na-agbaze karịa 3800 Celsius yana nguzogide kemịkalụ pụrụ iche.Na-eji teknụzụ vapor deposition (CVD) eme ihe,Ihe mkpuchi TaCnwere oke ruru 35 millimeters nwere ike idobe ya n'enweghị nsogbu na akụrụngwa graphite.Igwe nchekwa a abụghị naanị na-akwalite nkwụsi ike ihe kamakwa ọ na-agbatịkwu ogologo ndụ nke akụrụngwa graphite, n'ihi ya na-ebelata ọnụ ahịa mmepụta yana ịkwalite arụmọrụ arụmọrụ.

Semicera, onye na-eweta iheIhe mkpuchi TaC, enyerela aka n'ịgbanwe ụlọ ọrụ semiconductor.Site na teknụzụ ya dị oke ọnụ na ntinye aka na-enweghị atụ maka ịdị mma, Semicera enyerela ndị na-emepụta semiconductor aka imeri ihe ịma aka ndị siri ike ma nweta ọganihu ọhụrụ.Site n'inye mkpuchi TaC na arụmọrụ na-enweghị atụ na ntụkwasị obi, Semicera kwadoro ọnọdụ ya dị ka onye mmekọ tụkwasịrị obi maka ụlọ ọrụ semiconductor n'ụwa niile.

N'ikpeazụ, teknụzụ mkpuchi mkpuchi, kwadoro site na ihe ọhụrụ dị kaIhe mkpuchi TaCsite na Semicera, na-emezigharị mpaghara semiconductor ma na-emeghe ụzọ maka ọdịnihu dị mma na nke ga-adigide.