Kedu ihe bụ epitaxy?

Ọtụtụ ndị injinia amachaghịepitaxy, nke na-arụ ọrụ dị mkpa n'ichepụta ngwaọrụ semiconductor.Epitaksienwere ike iji ya na ngwaahịa mgbawa dị iche iche, ngwaahịa dị iche iche nwere ụdị epitaxy dị iche iche, gụnyereDị ka epitaxy, SiC epitaxy, GaN epitaxy, wdg.

Kedu ihe bụ epitaxy?
A na-akpọkarị epitaxy “Epitaxy” na bekee. Okwu a sitere na okwu Grik "epi" (nke putara "n'elu") na "taxis" (nke putara "nhazi"). Dị ka aha ahụ na-egosi, ọ pụtara ịhazi nke ọma n'elu ihe. Usoro epitaxy bụ itinye otu oyi akwa kristal dị mkpa n'otu mkpụrụ kristal. Otu oyi akwa kristal edobere ọhụrụ ka a na-akpọ oyi akwa epitaxial.

E nwere ụdị isi abụọ nke epitaxy: homoepitaxial na heteroepitaxial. Homoepitaxial na-ezo aka itolite otu ihe n'otu ụdị mkpụrụ. Okpokoro epitaxial na mkpụrụ ahụ nwere kpọmkwem otu ihe nhazi lattice ahụ. Heteroepitaxy bụ uto nke ihe ọzọ na mkpụrụ nke otu ihe. N'okwu a, nhazi nke lattice nke oyi akwa kristal nke epitaxially toro na mkpụrụ nwere ike ịdị iche. Kedu ihe bụ otu kristal na polycrystalline?
Na semiconductor, anyị na-anụkarị okwu ndị a bụ silicon crystal na silicon polycrystalline. Kedu ihe kpatara eji akpọ ụfọdụ silicon otu kristal na ụfọdụ silicon a na-akpọ polycrystalline?

Otu kristal: Nhazi nke lattice na-aga n'ihu ma na-agbanweghi agbanwe, na-enweghị oke ọka, ya bụ, kristal dum nwere otu lattice nwere ntụgharị kristal na-agbanwe agbanwe. Polycrystalline: Polycrystalline nwere ọtụtụ obere ọka, nke ọ bụla n'ime ha bụ otu kristal, na nhazi ha na-enweghị usoro gbasara ibe ha. A na-ekewa mkpụrụ ndị a site na oke oke ọka. Ọnụ ahịa mmepụta nke ihe polycrystalline dị ala karịa nke otu kristal, ya mere ha ka bara uru na ụfọdụ ngwa. Ebee ka usoro epitaxial ga-esonye?
N'ịmepụta sekit agbakwunyere na silicon, a na-eji usoro epitaxial eme ihe n'ọtụtụ ebe. Dịka ọmụmaatụ, a na-eji silicon epitaxy tolite oyi akwa silicon dị ọcha ma dị mma na-achịkwa na mkpụrụ silicon, nke dị oke mkpa maka imepụta sekit jikọtara ọnụ. Na mgbakwunye, na ngwaọrụ ike, SiC na GaN bụ ihe abụọ a na-ejikarị bandgap semiconductor nwere ikike njikwa ike dị mma. A na-etolitekarị ihe ndị a na silicon ma ọ bụ ihe ndị ọzọ site na epitaxy. Na nkwurịta okwu quantum, quantum bits dabere na semiconductor na-ejikarị ihe owuwu epitaxial silicon germanium. wdg.

Ụzọ nke uto epitaxial?

Ụzọ epitaxy semiconductor atọ a na-ejikarị:

Molecular beam epitaxy (MBE): Molecular beam epitaxy) bụ teknụzụ na-eto eto nke semiconductor emere n'okpuru ọnọdụ oghere dị elu. Na nkà na ụzụ a, a na-ekpochapụ ihe ndị na-esi na ya pụta n'ụdị atom ma ọ bụ molecular beams wee tinye ya na mkpụrụ osisi crystalline. MBE bụ teknụzụ na-eto eto nke ọma na nke nwere ike ịchịkwa semiconductor nke nwere ike ijikwa oke nke ihe echekwara na ọkwa atọm.

Metal organic CVD (MOCVD): Na usoro MOCVD, organic metals na hydride gas nke nwere ihe ndị a chọrọ ka a na-enye na mkpụrụ na okpomọkụ kwesịrị ekwesị, a na-emepụta ihe semiconductor chọrọ site na mmeghachi omume kemịkalụ ma tinye ya na mkpụrụ, ebe ndị fọdụrụnụ. A na-ahapụ ogige na ngwaahịa mmeghachi omume.

Vapor Phase Epitaxy (VPE): Vapor Phase Epitaxy bụ teknụzụ dị mkpa a na-ejikarị na-emepụta ngwaọrụ semiconductor. Ụkpụrụ ya bụ isi bụ ibufe vepo nke otu ihe ma ọ bụ ngwakọta na gas na-ebu ma tinye kristal na mkpụrụ site na mmeghachi omume kemịkal.