Kedu ihe bụ MOCVD Susceptor?

Metal-Organic Chemical Vapor Deposition (MOCVD) bụ usoro dị oke mkpa na ụlọ ọrụ semiconductor, ebe a na-edobe ihe nkiri dị mkpa dị elu n'elu ihe. Akụkụ bụ isi nke usoro MOCVD bụ ihe na-akpata, ihe dị mkpa nke na-arụ ọrụ dị oke mkpa n'ịhụ na ịdị n'otu na ịdị mma nke ihe nkiri a na-emepụta.

Kedu ihe bụ Susceptor? Susceptor bụ akụrụngwa pụrụ iche ejiri na usoro MOCVD iji kwado ma kpoo mkpụrụ nke etinyere ihe nkiri dị mkpa. Ọ na-arụ ọrụ dị iche iche, gụnyere itinye ike electromagnetic, na-atụgharị ya ka ọ bụrụ okpomoku, na-ekesa ọkụ a n'otu n'otu n'ofe mkpụrụ. Igwe kpo oku a na-edoghị anya dị mkpa maka uto nke ihe nkiri na-emekọ ihe na oke ọkpụrụkpụ na ihe mejupụtara ya.

Ụdị nke Susceptors:
1. Graphite Susceptors: A na-ekpuchi ya na oyi akwa nchekwa, dị kasilicon carbide (SiC), graphite susceptors mara maka ha elu thermal conductivity na nkwụsi ike. Nkemkpuchi SiCna-enye ebe nchekwa siri ike, nke na-egbochi mmebi na mmebi na oke okpomọkụ.

2. Silicon Carbide (SiC) Susceptors: A na-eme ihe ndị a kpamkpam site na SiC, na-enye ezigbo nkwụsi ike nke okpomọkụ na iguzogide iyi na akwa.SiC susceptorsdị mma karịsịa maka usoro okpomọkụ dị elu na gburugburu ndị na-emebi emebi.
KeduSusceptorsNa-arụ ọrụ na MOCVD:

N'ime usoro MOCVD, a na-ewebata precursors n'ime ụlọ reactor, ebe ha na-emebi ma meghachi omume iji mepụta ihe nkiri dị mkpa na mkpụrụ. Onye na-akpa ike na-arụ ọrụ dị oke mkpa site n'ịhụ na a na-ekpo ọkụ nke mkpụrụ osisi ahụ n'otu n'otu, nke dị oke mkpa maka ịmepụta ihe nkiri ihe nkiri na-agbanwe agbanwe n'ofe ala dum. A na-ahọrọ nke ọma ihe na imewe nke susceptor ka ọ dabara na ihe achọrọ nke usoro ntinye, dị ka oke okpomọkụ na ndakọrịta kemịkalụ.
Uru nke IjiỌdịmma Susceptors dị elu:
• Mma Film Ogo: Site n'inye otu okpomọkụ nkesa, susceptors na-enyere aka nweta ihe nkiri na-agbanwe agbanwe ọkpụrụkpụ na mejupụtara, nke dị oké mkpa maka arụmọrụ nke semiconductor ngwaọrụ.
• Ịbawanye arụmọrụ nke usoro: Ndị na-ahụ maka ihe ndị dị elu na-eme ka arụmọrụ zuru oke nke usoro MOCVD dịkwuo mma site n'ibelata ohere nke ntụpọ na ịba ụba nke ihe nkiri a na-eji eme ihe.
• Ogologo oge na ntụkwasị obi: Susceptors sitere na ihe ndị na-adịgide adịgide dị ka SiC na-eme ka ntụkwasị obi dị ogologo oge ma belata ụgwọ ọrụ mmezi.

Mkpebi: Onye na-ahụ maka ihe bụ ihe dị mkpa na usoro MOCVD, na-emetụta àgwà na arụmọrụ nke ntinye ihe nkiri dị mkpa. Site na ịhọrọ ezigbo susceptor ihe na imewe, ndị na-emepụta semiconductor nwere ike ịkwalite usoro ha, na-eme ka arụmọrụ ngwaọrụ dị mma na ọnụ ahịa mmepụta ihe dị ala. Ka ọchịchọ maka ngwaọrụ eletrọnịkị na-arụ ọrụ dị elu na-aga n'ihu na-eto eto, mkpa ọ dị elu MOCVD susc.