NkeMOCVDUsoro bụ otu n'ime usoro kwụsiri ike nke a na-eji ugbu a na ụlọ ọrụ na-eto ihe nkiri dị obere kristal dị elu, dị ka otu usoro InGaN epilayers, ihe III-N, na ihe nkiri semiconductor nwere nnukwu ụlọ olulu mmiri dị ukwuu, yana ọ dị oke mkpa na mmepụta nke semiconductor na optoelectronic ngwaọrụ.
NkeSiC mkpuchi MOCVD susceptorbụ ihe njide wafer pụrụ iche nke ejiri silicon carbide (SiC) kpuchie makaepitaxial itolite n'usoro nhazi ihe eji emepụta kemịkalụ kemịkalụ igwe (MOCVD).
Ihe mkpuchi SiC nwere ezigbo nguzogide kemịkalụ na nkwụsi ike ọkụ, na-eme ka ọ bụrụ ezigbo nhọrọ maka ndị na-ahụ maka MOCVD ejiri na-achọ usoro uto epitaxial.
Akụkụ bụ isi nke usoro MOCVD bụ ihe na-akpata, nke bụ ihe dị mkpa iji hụ na ịdị n'otu na ịdị mma nke ihe nkiri ndị dị mkpa emepụtara.
Kedu ihe bụ susceptor? Ihe nkpuchi bụ ihe pụrụ iche nke a na-eji na usoro MOCVD iji kwado ma kpoo mkpụrụ nke etinyere ihe nkiri dị mkpa na ya. Ọ nwere ọtụtụ ọrụ, gụnyere itinye ike electromagnetic, ịtụgharị ya ka ọ bụrụ okpomoku, na ikesa ọkụ n'otu n'otu na mkpụrụ. Nke a edo kpo oku dị oké mkpa maka uto nke edo mkpa fim na kpọmkwem ọkpụrụkpụ na mejupụtara.
Ụdị nke susceptors:
1. Graphite susceptors: A na-ekpuchikarị ihe mkpuchi graphite na oyi akwa nchebe dị ka.silicon carbide (SiC), nke a maara maka ịdị elu nke thermal conductivity na nkwụsi ike. Nkemkpuchi SiCna-enye ebe nchekwa siri ike, nke na-egbochi mmebi na mmebi na oke okpomọkụ.
2. Silicon carbide (SiC) susceptors: A na-eme ihe ndị a kpamkpam nke SiC ma nwee ezigbo nkwụsi ike nke okpomọkụ ma na-eyi nguzogide. Ndị susceptors SiC dabara adaba maka usoro okpomọkụ dị elu na gburugburu ndị na-emebi emebi.
Otu ndị susceptors si arụ ọrụ na MOCVD:
N'ime usoro MOCVD, a na-ewebata ihe mmalite n'ime ụlọ mmeghachi omume ebe ha na-emebi ma meghachi omume iji mepụta ihe nkiri dị mkpa na mkpụrụ. Onye na-ahụ maka ihe na-arụ ọrụ dị mkpa site n'ịhụ na mkpụrụ ahụ na-ekpo ọkụ nke ọma, nke dị oke mkpa iji nweta ihe nkiri ihe nkiri na-agbanwe agbanwe n'ofe ala dum. A na-eji nlezianya ahọrọ ihe na imewe nke susceptor iji mezuo ihe ndị a chọrọ maka usoro ntinye, dị ka okpomọkụ okpomọkụ na ndakọrịta kemịkalụ.
Uru nke iji susceptors dị oke mma:
• Mma ihe nkiri dị mma: Site n'inye nkesa okpomọkụ otu, onye na-ekpuchi ya na-enyere aka nweta ihe nkiri na-agbanwe agbanwe na ihe mejupụtara, nke dị oke mkpa maka ịrụ ọrụ nke ngwaọrụ semiconductor.
• Nrụpụta arụmọrụ nke ọma: Ndị na-enwe mmetụta dị elu na-eme ka arụmọrụ nke usoro MOCVD dịkwuo mma site n'ibelata ohere nke nkwarụ na ịba ụba nke ihe nkiri ndị a na-eji eme ihe.
• Ndụ ndụ na ntụkwasị obi: Susceptors nke ihe na-adịgide adịgide dị ka SiC na-eme ka ntụkwasị obi dị ogologo oge ma belata ụgwọ ọrụ.
Onye na-eche nche bụ ihe dị mkpa na usoro MOCVD ma na-emetụta àgwà na arụmọrụ nke ntinye ihe nkiri dị mkpa. Maka ozi ndị ọzọ gbasara nha dịnụ, MOCVD susceptors na ọnụ ahịa, biko egbula oge ịkpọtụrụ anyị. Ndị injinia anyị ga-enwe obi ụtọ inye gị ndụmọdụ maka ihe ndị kwesịrị ekwesị ma zaa ajụjụ gị niile.
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Oge nzipu: Ọgọst-12-2024