N'ime usoro nkwadebe wafer, enwere njikọ isi abụọ: otu bụ nkwadebe nke mkpụrụ, nke ọzọ bụ mmejuputa usoro epitaxial. Mkpụrụ ahụ, wafer nke ejiri nlezianya mee ya site na semiconductor otu ihe kristal, nwere ike itinye ya ozugbo na usoro nrụpụta wafer dị ka ihe ndabere iji mepụta ngwaọrụ semiconductor, ma ọ bụ nwee ike ịkwalite ya site na usoro epitaxial.
Yabụ, kedu ihe bụ denotation? Na nkenke, epitaxy bụ uto nke oyi akwa ọhụrụ nke otu kristal na otu mkpụrụ kristal nke edoziworo nke ọma (ịcha, ichicha, polishing, wdg). Nke a ọhụrụ otu kristal oyi akwa na mkpụrụ nwere ike ime nke otu ihe ma ọ bụ dị iche iche ihe, nke mere na otu ma ọ bụ heteroepitaxial ibu nwere ike nweta dị ka mkpa. N'ihi na otu oyi akwa kristal tolitere ọhụrụ ga-agbasa dịka akụkụ kristal nke mkpụrụ ahụ si dị, a na-akpọ ya oyi akwa epitaxial. Ọkpụrụkpụ ya na-abụkarị naanị micron ole na ole. N'ịwere silicon dị ka ọmụmaatụ, uto nke silicon epitaxial bụ itolite oyi akwa silicon nke nwere otu ntụgharị kristal dị ka mkpụrụ, mgbochi na ọkpụrụkpụ nke nwere ike ịchịkwa, n'otu mkpụrụ silicon otu kristal nwere ntụgharị kristal akọwapụtara. Otu oyi akwa silicon otu kristal nwere usoro lattice zuru oke. Mgbe oyi akwa epitaxial na-etolite na mkpụrụ, a na-akpọ ya dum epitaxial wafer.
Maka ụlọ ọrụ semiconductor silicon ọdịnala, imepụta igwe dị elu na ike dị elu ozugbo na wafer silicon ga-ezute ụfọdụ ihe isi ike teknụzụ. Dịka ọmụmaatụ, ihe ndị a chọrọ nke voltaji nkwụsịtụ dị elu, obere nkwụsị usoro na obere saturation voltaji na-adaba na mpaghara onye nchịkọta na-esiri ike iru. Iwebata teknụzụ epitaxy na-eji akọ dozie nsogbu ndị a. Ihe ngwọta bụ ịmalite oyi akwa epitaxial dị elu na obere silicon substrate, wee mepụta ngwaọrụ na akwa akwa epitaxial. N'ụzọ dị otú a, elu-resistivity epitaxial oyi akwa na-enye a elu mmebi voltaji maka ngwaọrụ, mgbe obere-resistivity mkpụrụ na-ebelata iguzogide nke mkpụrụ, si otú ibelata saturation voltaji dobe, si otú ọbọ elu mmebi voltaji na obere Balance n'etiti iguzogide na obere mbelata voltaji.
Na mgbakwunye, teknụzụ epitaxy dị ka vapor phase epitaxy na mmiri mmiri epitaxy nke GaAs na ndị ọzọ III-V, II-VI na ihe ndị ọzọ molekụla compound semiconductor ihe emebekwara nke ukwuu ma bụrụkwa ihe ndabere maka ọtụtụ ngwa ngwa ngwa ndakwa nri, ngwaọrụ optoelectronic na ike. ngwaọrụ. Teknụzụ usoro dị mkpa maka mmepụta, ọkachasị ngwa nke teknụzụ molekụla na igwe-organic vapor-phase epitaxy technology na akwa akwa, superlatices, olulu mmiri quantum, superlattices strained, na atomiki-larịị thin-layer epitaxy aghọwo ubi ọhụrụ nke nyocha semiconductor. Mmepe nke "Energy Belt Project" etinyela ntọala siri ike.
N'ihe gbasara ngwaọrụ semiconductor nke ọgbọ nke atọ, ihe fọrọ nke nta ka ọ bụrụ ngwaọrụ semiconductor niile ka a na-eme na oyi akwa epitaxial, na silicon carbide wafer n'onwe ya na-eje ozi dị ka mkpụrụ. Ọkpụrụkpụ nke ihe SiC epitaxial, ntinye ihe na-ebu ihe ndabere na ihe ndị ọzọ na-ekpebi ngwa eletrik dị iche iche nke ngwaọrụ SiC ozugbo. Ngwa silicon carbide maka ngwa voltaji dị elu na-ewepụta ihe ọhụrụ chọrọ maka paramita dị ka ọkpụrụkpụ nke ihe epitaxial na itinye uche n'azụ. Ya mere, teknụzụ silicon carbide epitaxial na-arụ ọrụ dị mkpa n'iji arụ ọrụ nke ngwaọrụ silicon carbide zuru oke. Nkwadebe nke ihe fọrọ nke nta ka ọ bụrụ ngwaọrụ SiC ike niile dabere na SiC epitaxial wafers dị elu. Mmepụta nke akwa epitaxial bụ akụkụ dị mkpa nke ụlọ ọrụ semiconductor bandgap sara mbara.
Oge nzipu: Mee-06-2024