Ihe kpatara na ngwaọrụ Semiconductor ji achọ "Epitaxial Layer"

Mmalite nke aha "Epitaxial Wafer"

Nkwadebe wafer nwere usoro abụọ bụ isi: nkwadebe mkpụrụ na usoro epitaxial. A na-eme mkpụrụ ahụ nke semiconductor otu ihe kristal ma a na-ahazi ya iji mepụta ngwaọrụ semiconductor. Ọ nwekwara ike ịmalite nhazi epitaxial iji mepụta wafer epitaxial. Epitaxy na-ezo aka na usoro itolite otu oyi akwa kristal ọhụrụ na otu mkpụrụ kristal ejiri nlezianya hazie ya. Otu kristal ọhụrụ ahụ nwere ike ịbụ otu ihe ahụ dị ka mkpụrụ (epitaxy homogenous) ma ọ bụ ihe dị iche (heterogeneous epitaxy). Ebe ọ bụ na oyi akwa kristal ọhụrụ na-eto n'ụzọ kwekọrọ na ntụzịaka kristal nke mkpụrụ, a na-akpọ ya oyi akwa epitaxial. A na-akpọ wafer nwere oyi akwa epitaxial dị ka wafer epitaxial (epitaxial wafer = epitaxial Layer + substrate). A na-akpọ ngwaọrụ ndị emepụtara na oyi akwa epitaxial "Epitaxy na-aga n'ihu," ebe a na-akpọ ngwaọrụ ndị a na-emepụta na mkpụrụ osisi "reverse epitaxy," ebe epitaxial oyi akwa na-eje ozi naanị dị ka nkwado.

Epitaxy dị n'ụdị na nke dị iche iche

▪Epitaxy na-emekọ ihe:A na-eji otu ihe eji eme akwa epitaxial na mkpụrụ: dịka, Si/Si, GaAs/GaAs, GaP/GaP.

▪Epitaxy dị iche iche:A na-eji ihe dị iche iche mee oyi akwa epitaxial na mkpụrụ: dịka, Si/Al₂O₃, GaS/Si, GaAlAs/GaAs, GaN/SiC, wdg.

Wafers chara acha

Kedu nsogbu Epitaxy na-edozi?

Naanị otu ihe kristal ezughi oke iji gboo ihe na-agbagwoju anya nke imepụta ngwaọrụ semiconductor. Ya mere, n'ọgwụgwụ 1959, e mepụtara usoro uto kristal dị mkpa nke a maara dị ka epitaxy. Mana kedu ka teknụzụ epitaxial siri nyere aka n'ịkwalite ihe? Maka silicon, mmepe nke silicon epitaxy mere n'oge dị oke egwu mgbe nrụpụta nke igwe transistor silicon dị elu nwere nnukwu nsogbu. Site n'echiche nke ụkpụrụ transistor, iru eru ugboro na ike chọrọ ka voltaji mmebi nke mpaghara onye na-anakọta dị elu, na nguzogide usoro ahụ dị ala, nke pụtara voltaji saturation kwesịrị ịdị obere. Nke mbụ na-achọ ihe mgbochi dị elu na ihe nchịkọta ihe, ebe nke ikpeazụ na-achọ ihe mgbochi dị ala, nke na-emepụta esemokwu. Mbelata ọkpụrụkpụ nke mpaghara mkpokọ iji belata nguzogide usoro ga-eme ka silicon wafer dị oke mkpa ma na-emebi emebi maka nhazi, na iweda ihe mgbochi ga-emegide ihe mbụ achọrọ. Mmepe nke teknụzụ epitaxial dozie okwu a nke ọma. Ihe ngwọta ya bụ itolite oyi akwa epitaxial resistivity dị elu n'elu mkpụrụ na-eguzogide obere. A na-emepụta ngwaọrụ ahụ na oyi akwa epitaxial, na-eme ka voltaji na-agbaji dị elu nke transistor, ebe obere ihe mgbochi na-ebelata ihe mgbochi isi ma na-ebelata voltaji saturation, na-edozi esemokwu n'etiti ihe abụọ a chọrọ.

Na mgbakwunye, teknụzụ epitaxial maka III-V na II-VI semiconductors compound dị ka GaAs, GaN, na ndị ọzọ, gụnyere vapor phase na mmiri mmiri epitaxy, ahụla ọganihu dị ukwuu. Teknụzụ ndị a abụrụla ihe dị mkpa maka imepụta ọtụtụ ngwa microwave, optoelectronic, na ngwaọrụ ike. Karịsịa, a na-etinye usoro ndị dị ka molecular beam epitaxy (MBE) na metal-organic chemical vapor deposition (MOCVD) n'ụzọ gara nke ọma n'ụdị dị larịị, superlatices, olulu mmiri quantum, superlattices na-agba agba, na atomiki-scale thin epitaxial layers, na-atọ ntọala siri ike maka ya. mmepe nke ngalaba semiconductor ọhụrụ dị ka “band engineering”.

N'ime ngwa bara uru, a na-emepụta ọtụtụ ngwaọrụ semiconductor nke nwere bandgap n'ụdị epitaxial, yana ihe ndị dị ka silicon carbide (SiC) ka a na-eji naanị dị ka mkpụrụ. Ya mere, ịchịkwa oyi akwa epitaxial bụ ihe dị oke mkpa na ụlọ ọrụ semiconductor obosara-bandgap.

Teknụzụ Epitaxy: Akụkụ isi asaa

1. Epitaxy nwere ike itolite elu (ma ọ bụ ala) resistivity oyi akwa na ala (ma ọ bụ elu) resistivity mkpụrụ.

2. Epitaxy na-enye ohere uto nke N (ma ọ bụ P) ụdị epitaxial layers na P (ma ọ bụ N) ụdị ihe ntanetị, na-emepụta njikọ PN ozugbo na-enweghị nsogbu ụgwọ ọrụ na-ebilite mgbe ị na-eji mgbasa ozi iji mepụta njikọ PN na otu mkpụrụ kristal.

3. Mgbe ejikọtara ya na teknụzụ nkpuchi, a pụrụ ịrụpụta uto epitaxial na-ahọrọ na mpaghara ụfọdụ, na-eme ka ịmepụta sekit jikọtara ọnụ na ngwaọrụ nwere akụkụ pụrụ iche.

4. Epitaxial uto na-enye ohere maka ịchịkwa ụdị doping na ntinye uche, na-enwe ike ime mgbanwe mberede ma ọ bụ nwayọọ nwayọọ na ntinye uche.

5. Epitaxy nwere ike na-eto eto dị iche iche, multi-layered, multi-component compounds with variable compounds, gụnyere ultra-thin layers.

6. Epitaxial uto nwere ike ime na okpomọkụ dị n'okpuru ebe mgbaze nke ihe ahụ, na-enwe ọganihu na-achịkwa, na-enye ohere maka ọkwa ọkwa atomic na oyi akwa oyi akwa.

7. Epitaxy na-enyere aka itolite otu kristal n'ígwé nke ihe na-enweghị ike ịdọrọ n'ime kristal, dị ka GaN na ternary / quaternary compound semiconductor.

Epitaxial Layers dị iche iche na usoro Epitaxial

Na nchịkọta, akwa epitaxial na-enye nhazi kristal dị mfe na-achịkwa nke ọma na nke zuru oke karịa nnukwu mkpụrụ, nke bara uru maka ịmepụta ihe dị elu.