Okwu mmalite nke ihe na-ebu wafer
CATAGORY ngwaahịa
▶Sistemụ ụgbọelu Wafer maka Usoro PECVD & TALOX
• Ụgbọ mmiri eserese PECVD & TALOX (M4~M12)
• Ụgbọ mmiri kwụ ọtọ (M4, M6)
• Mpịnye & ịsa ahụ ihe osise (M4~M6)
• C/C Tray & mkpuchi seramiiki
• igwe RIE-Tray & mkpuchi seramiiki
• Akara Vacuum: O-Ring & SQ-Ring
▶Usoro mbufe ederede & Wet Etching
• LSC H-ebu ma ọ bụ cassette (M4 ~ M12)
• LSC V-ebu ma ọ bụ cassette (M4 ~ M12)
• Onye na-ebu ASC ma ọ bụ cassette (M4, M6)
• Ebube W/F & Igbe nchekwa (M4 ~ M12)
• Ụgbọ njem (Roller) Series
▶Onye na-ebu cell anyanwụ & igwe ihe
• Onye na-ebu TRC ma ọ bụ cassette (M4 ~ M12)
• Magazin (ya na BELT)
Ụgbọ mmiri Graphite (H-Ụdị)
19P6-216CT (WF M4-M12)
Ụgbọ mmiri Graphite (H-Ụdị)
21P6-240CT WF M4~M12)
Ụgbọ mmiri Graphite (H-Ụdị)
23P7-308CT(W/F M4~M12)
Ụgbọ mmiri Graphite (H-Ụdị)
22P/7-294TP (W/F M4~M12)
Ụgbọ mmiri Graphite (H-Ụdị)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF ebu na igbe nchekwa (~M12)
C/C TRAY ma ọ bụ ebu (M4 ~ M10)
C/C TRAY ma ọ bụ ebu (M4 ~ M10)
Ụgbọ mmiri kwụ ọtọ (SM) M6
LSC-H-Ọdụ (~M12)
LSC-V-Ọdụ (~M12)
Onye na-ebu ASC (~M6)
Onye na-ebu TRC (~M12)
Onye na-ebu TRC (~M12)
Ụgbọ mmiri Graphite (M12)
Sistemụ ihe na-ebu Wafer maka Usoro PECVD
▶ Ụgbọ mmiri Graphite (CT-Ebere) Usoro M10/M12
• Echiche Nhazi Pụrụ Iche
▶ Ụgbọ mmiri Graphite (CT-Designed) M4/M6 Usoro
▶ Akụkụ Ngwa ụgbọ mmiri
▶ ụgbọ mmiri kwụ ọtọ-161.7mm WAFER
▶ Ụgbọ mmiri kwụ ọtọ-166mm WAFER
▶ ụgbọ mmiri kwụ ọtọ-161.7mm, 166mm WAFER
Onye na-ebu cell anyanwụ & igwe igwe TRC
Ụdị: akpaaka
Nha WAFER: ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
Ojiji: Buru (kaseti)
Ikike: 100 mpempe akwụkwọ
Okpokoro: 4.76MM/5.953mm/6.35mm
Akụkụ: Ihe dịka 559 × 220 × 220MM
Ihe dịka 712 × 260 × 260MM
Uru: ikuku
Ihe: ire ọkụ, akụkụ mmanya-aluminom (anodizing)
Efere Efere-POM (Antistatic)
Ihe mkpuchi nke mmanya ala-EPDM/PU/VITON (ASE)
TRC-METAL CARRIER (ỤRỤ U'SER)
TRC-METAL CARRIER (ỤRỤ U'SER)
TRC-METAL CARRIER (ỤRỤ U'SER)
Efere efere & tinye, ebu
