Kaseti PFA

Nkọwa dị mkpirikpi:

Kaseti PFA- Nweta nguzogide kemịkalụ na-enweghị atụ na ogologo oge na Semicera's PFA Cassette, ezigbo ngwọta maka njikwa wafer dị mma na nke ọma na nrụpụta semiconductor.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Semiceranwere obi ụtọ inye ndịKaseti PFA, Nhọrọ dị oke ọnụ maka njikwa wafer na gburugburu ebe nguzogide kemịkalụ na ịdịte aka dị oke mkpa. Emebere ya site na ihe dị elu nke Perfluoroalkoxy (PFA), kaseti a ka emebere ka ọ nagide ọnọdụ kachasị achọ na nrụpụta semiconductor, na-ahụ maka nchekwa na iguzosi ike n'ezi ihe nke wafers gị.

Nguzogide kemịkalụ enweghị atụNkeKaseti PFAemebere ya iji nye nguzogide dị elu karịa ụdị kemịkalụ dị iche iche, na-eme ka ọ bụrụ nhọrọ zuru oke maka usoro nke gụnyere acids ike ike, ihe mgbaze, na kemịkalụ ndị ọzọ siri ike. Mgbochi kemịkalụ a siri ike na-eme ka kaseti ahụ ka dịgidere ma na-arụ ọrụ ọbụna na gburugburu ebe ndị kacha emebi emebi, si otú a na-agbatị ndụ ya ma na-ebelata mkpa ọ dị iji dochie anya mgbe niile.

Elu-Ọcha EwuNke SemiceraKaseti PFAA na-emepụta ya site na ihe PFA dị ọcha, nke dị oke mkpa na igbochi mmetọ n'oge nhazi wafer. Ihe owuwu a dị oke ọcha na-ebelata ihe ize ndụ nke ọgbọ irighiri ihe na nsị kemịkalụ, na-ahụ na echekwabara wafers gị pụọ na adịghị ọcha nke nwere ike imebi ogo ha.

Ọdịgidere emelitere na arụmọrụEzubere maka ịdịte aka, nkeKaseti PFAna-ejigide iguzosi ike n'ezi ihe nhazi ya n'okpuru oke okpomọkụ yana ọnọdụ nhazi siri ike. Ma ekpughere ya na okpomọkụ dị elu ma ọ bụ ejiri ya mee ihe ugboro ugboro, kaseti a na-ejigide ọdịdị ya na arụmọrụ ya, na-enye ntụkwasị obi ogologo oge na gburugburu ebe nrụpụta ihe.

Injinia nkenke maka njikwa echekwaraNkeKaseti PFA Semiceraatụmatụ injinịa ziri ezi nke na-eme ka njikwa wafer kwụsie ike ma kwụsie ike. Emebere oghere ọ bụla nke ọma iji jide wafers na nchekwa, na-egbochi mmegharị ọ bụla ma ọ bụ mgbanwe ọ bụla nwere ike ibute mmebi. Injinia nkenke a na-akwado ntinye wafer na-agbanwe agbanwe na nke ziri ezi, na-atụnye aka na nhazi usoro n'ozuzu ya.

Ngwa dịgasị iche iche gafere usoroN'ihi ya elu ihe onwunwe Njirimara, naKaseti PFAnwere ike iji ya mee ihe n'ofe dị iche iche nke imepụta semiconductor. Ọ dabara nke ọma maka mmiri etching, kemịkalụ vapor deposition (CVD), na usoro ndị ọzọ metụtara gburugburu kemịkalụ siri ike. Ngbanwe ya na-eme ka ọ bụrụ ngwá ọrụ dị mkpa n'ịkwado iguzosi ike n'ezi ihe na ịdị mma wafer.

Nkwenye n'ịdị mma na ihe ọhụrụNa Semicera, anyị na-agba mbọ ịnye ngwaahịa ndị na-agbaso ụkpụrụ ụlọ ọrụ kachasị elu. NkeKaseti PFAna-egosipụta nkwa a, na-enye ihe ngwọta a pụrụ ịdabere na ya nke na-ejikọta n'enweghị nsogbu na usoro mmepụta gị. Cassette ọ bụla na-enweta njikwa mma siri ike iji hụ na ọ na-emezu ụkpụrụ arụmọrụ anyị siri ike, na-ebuga ịdị mma ị tụrụ anya na Semicera.

Ihe

Mmepụta

Nnyocha

Dummy

kristal Parameters

Ụdị poly

4H

Njehie nhazi ihu elu

<11-20>4±0.15°

Igwe ọkụ eletrik

Dopant

n-ụdị Nitrogen

Nguzogide

0.015-0.025ohm·cm

Mechanical Parameters

Dayameta

150.0± 0.2mm

Ọkpụrụkpụ

350± 25 μm

Ntuzi aka dị larịị

[1-100]±5°

Ogologo larịị nke isi

47.5 ± 1.5mm

Ụlọ nke abụọ

Ọ dịghị

TTV

≤5 μm

≤10 μm

≤15 μm

LTV

≤3 μm (5mm*5mm)

≤5 μm (5mm*5mm)

≤10 μm (5mm*5mm)

Ụta

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤35 μm

≤45 μm

≤55 μm

Ihu ihu (Si-face) adịghị ike (AFM)

Ra≤0.2nm (5μm*5μm)

Nhazi

Njupụta Micropipe

<1 ea/cm2

<10 nkea/cm2

<15 ea/cm2

Igwe adịghị ọcha

≤5E10atom/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Ogo ihu

N'ihu

Si

Ngwucha elu

Si-ihu CMP

Ụmụ irighiri ihe

≤60ea/wafer (nha≥0.3μm)

NA

Ọkpụkpụ

≤5ea/mm. Ogologo ngụkọta ≤ Dayameta

Ogologo ngụkọta ≤2* dayameta

NA

Peel oroma / olulu / ntụpọ / striations / mgbawa / mmetọ

Ọ dịghị

NA

Iberibe ibe / indents / mgbaji / hex

Ọ dịghị

Mpaghara polytype

Ọ dịghị

Mpaghara mkpokọta≤20%

Mpaghara mkpokọta≤30%

Akara laser n'ihu

Ọ dịghị

Ogo azụ

Ngwunye azụ

C-ihu CMP

Ọkpụkpụ

≤5ea/mm, Mgbakọ ogologo≤2* dayameta

NA

Nrụrụ azụ (nkịta ihu/indents)

Ọ dịghị

Azụ isi ike

Ra≤0.2nm (5μm*5μm)

Akara laser azụ

1 mm (si n'akụkụ elu)

Ọnụ

Ọnụ

Chamfer

Nkwakọ ngwaahịa

Nkwakọ ngwaahịa

Epi dị njikere na nkwakọ ihe efu

Ngwunye cassette ọtụtụ wafer

* Ihe edeturu: "NA" pụtara enweghị arịrịọ Ihe anaghị ekwupụta nwere ike na-ezo aka na SEMI-STD.

tech_1_2_size
SiC wafers

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