RTP CVD SiC mgbanaka

Nkọwa dị mkpirikpi:

Ihe mgbanaka RTP CVD SiC bụ silicon carbide (SiC), nke mejupụtara kemịkalụ ya na nhazi kristal na-enye ya ọmarịcha arụmọrụ. Silicon carbide bụ ihe seramiiki nwere ebe mgbaze dị elu, ike siri ike na ezigbo nguzogide corrosion. Ọ na-egosipụta ezigbo conductivity thermal na nkwụsi ike kemịkalụ na oke okpomọkụ, ma nwee ike ọrụ dị mma ma na-eyi nguzogide.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Kedu ihe kpatara Silicon Carbide Etching Ring?

RTPCVD SiC yiri mgbaakaa na-ejikarị eme ihe na ụlọ ọrụ mmepụta ihe na sayensị na okpomọkụ dị elu na gburugburu ebe obibi corrosive. Ọ na-arụ ọrụ dị mkpa na nrụpụta semiconductor, optoelectronics, igwe ziri ezi na ụlọ ọrụ kemịkalụ. Ngwa akọwapụtara gụnyere:

1. Semiconductor mmepụta:RTP CVD SiC yiri mgbaakaenwere ike iji kpo oku na kpo oku nke akụrụngwa semiconductor, na-enye njikwa okpomọkụ kwụsiri ike ma hụ na izi ezi na nkwụsi ike nke usoro ahụ.

2. Optoelectronics: N'ihi ọmarịcha ọkụ ọkụ na oke okpomọkụ, RTPCVD SiC yiri mgbaakaenwere ike iji ya dị ka ihe nkwado na ikpo ọkụ ọkụ maka lasers, fiber optic communication equipment and optical components.

3. Igwe eji eme ihe nkenke: RTP CVD SiC nwere ike iji mgbanaka nkenke maka ngwa na akụrụngwa na oke okpomọkụ na gburugburu ebe na-emebi emebi, dị ka ọkụ ọkụ dị elu, ngwaọrụ na-ekpo ọkụ na reactors chemical.

4. Chemical ụlọ ọrụ: N'ihi ya corrosion eguzogide na chemical nkwụsi ike, RTP CVD SiC yiri mgbanaka nwere ike ji mee ihe na containers, ọkpọkọ na reactors na chemical mmeghachi omume na catalytic Filiks.

Sistemụ Epi

Sistemụ RTP

Sistemụ CVD

arụmọrụ ngwaahịa:

1. Zute usoro n'okpuru 28nm

2. Super corrosion eguzogide

3. Super dị ọcha arụmọrụ

4. Super ike

5. Nnukwu njupụta

6. Nnukwu okpomọkụ na-eguzogide

7. Yiri nguzogide

Ngwa ngwaahịa:

Ihe ndị dị na silicon carbide nwere njirimara nke ike siri ike, na-eyi nguzogide, nguzogide corrosion na nkwụsi ike dị elu. A na-eji ngwaahịa ndị nwere arụmọrụ zuru oke nke ọma na usoro etching akọrọ na TF/Diffusion.