SiC mkpuchi graphite okpomọkụ maka MOCVD K465i, epitaxial graphite okpomọkụ maka semiconductor akụrụngwa

Nkọwa dị mkpirikpi:

Ụgwọ nke ụlọ ọrụ Semicera EnergyỤgwọ nke ụlọ ọrụ Technology Co., Ltd.bụ onye na-ebute ụzọ na-eweta ọkachamara na wafer na ihe oriri semiconductor dị elu.Anyị raara onwe anyị nye inye ngwaahịa dị elu, ntụkwasị obi, na ihe ọhụrụ maka nrụpụta semiconductor,ụlọ ọrụ fotovoltaicna mpaghara ndị ọzọ metụtara ya.

Ahịrị ngwaahịa anyị gụnyere ngwaahịa graphite nke SiC / TaC na ngwaahịa seramiiki, gụnyere ihe dị iche iche dị ka silicon carbide, silicon nitride, na aluminum oxide na wdg.

Dị ka onye na-ebubata ntụkwasị obi, anyị ghọtara mkpa ihe oriri na-emepụta na usoro mmepụta ihe, anyị na-agbakwa mbọ na-ebuga ngwaahịa ndị na-agbaso ụkpụrụ kachasị elu iji mezuo mkpa ndị ahịa anyị.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Isi atụmatụ nke ikpo ọkụ graphite:

1. uniformity nke kpo oku Ọdịdị.

2. ezigbo ọkụ eletrik na ibu eletrik dị elu.

3. nguzogide corrosion.

4. inoxidizability.

5. elu chemical ịdị ọcha.

6. ike n'ibu ike.

Ihe bara uru bụ ike ịrụ ọrụ nke ọma, uru dị elu na mmezi dị ala. Anyị nwere ike ịmepụta mgbochi-oxidation na ogologo ndụ ogologo oge graphite crucible, graphite ebu na akụkụ niile nke ikpo ọkụ graphite.

Isi ihe nke ikpo ọkụ graphite

Nkọwa nka nka	VET-M3
Njupụta buru ibu (g/cm3)	≥1.85
Ọdịnaya Ash (PPM)	≤500
Oke ike ike	≥45
Nguzogide akọwapụtara (μ.Ω.m)	≤12
Ike Flexural (Mpa)	≥40
Ike mkpakọ (Mpa)	≥70
Oke. Nha ọka (μm)	≤43
Ọnụọgụ nke Mgbasa ọkụ Mm/°C	≤4.4*10-6