Usoro mkpuchi SiC maka ntọala graphite SiC mkpuchi eserese eserese

Usoro mkpuchi SiC maka ntọala graphite SiC mkpuchi ihe eserese eserese eserese

Nkọwa dị mkpirikpi:

Semicera Energy Technology Co.,Ltd bụ onye na-ebubata ceramik semiconductor dị elu. Isi ngwaahịa anyị gụnyere: Silicon carbide etched discs, silicon carbide boat trailers, silicon carbide wafer ụgbọ mmiri (PV & Semiconductor), silicon carbide oven tubes, silicon carbide cantilever paddles, silicon carbide chuck, silicon carbide beams, yana CVD SiC mkpuchi na Ihe mkpuchi TaC.
A na-ejikarị ngwaahịa ndị a na semiconductor na ụlọ ọrụ fotovoltaic, dị ka kristal ibu, epitaxy, etching, nkwakọ, mkpuchi na mgbasa ọkụ ọkụ.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Nkọwa

Anyị na-edobe oke nso mgbe anyị na-etinye ihemkpuchi SiC, na-eji igwe dị elu dị elu iji hụ na profaịlụ susceptor edo edo. Anyị na-emepụtakwa ihe ndị nwere ezigbo nguzogide ọkụ eletrik maka ojiji na sistemụ na-ekpo ọkụ inductively. Ngwa niile emechara na-abịa na akwụkwọ nrube isi na ịdị ọcha.

Ụlọ ọrụ anyị na-enyemkpuchi SiCusoro ọrụ site na usoro CVD n'elu graphite, ceramics na ihe ndị ọzọ, nke mere na gas pụrụ iche nwere carbon na silicon na-emeghachi omume na okpomọkụ dị elu iji nweta mkpụrụ ndụ SiC dị ọcha, ụmụ irighiri ihe ndị a na-etinye n'elu ihe ndị a na-ekpuchi, na-akpụ SIC nchebe oyi akwa. The SIC guzobere na-ike bonded na graphite isi, na-enye graphite isi pụrụ iche Njirimara, si otú na-eme ka elu nke graphite kọmpat, Porosity-free, elu okpomọkụ nguzogide, corrosion iguzogide na oxidation resistance.

gf (1)

Usoro CVD na-anapụta ịdị ọcha nke ukwuu na njupụta nke usoro iwumkpuchi SiCna-enweghị porosity. Ihe ọzọ bụ, ebe silicon carbide siri ike nke ukwuu, enwere ike ịchacha ya na elu dị ka enyo.CVD silicon carbide (SiC) mkpuchiewepụtara ọtụtụ uru gụnyere elu ịdị ọcha dị oke elu yana ịdịte aka nke ukwuu. Dị ka ngwaahịa mkpuchi mkpuchi nwere nnukwu arụmọrụ na oghere dị elu na ọnọdụ okpomọkụ dị elu, ha dị mma maka ngwa na ụlọ ọrụ semiconductor na ebe ndị ọzọ dị ọcha. Anyị na-enyekwa ngwaahịa pyrolytic graphite (PG).

Isi atụmatụ

1. Nguzogide oxidation dị elu:
Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.
2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye ikuku kemịkalụ n'okpuru ọnọdụ chlorination dị elu.
3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.
4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.

Isi-05

Isi-04

Isi-03

Nkọwa isi nke mkpuchi CVD-SIC

SiC-CVD
Njupụta	(g/cc)	3.21
Ike mgbanwe	(Mpa)	470
Mgbasa ọkụ ọkụ	(10-6/K)	4
Thermal conductivity	(W/mK)	300

Ngwa

E tinyela mkpuchi mkpuchi silicon carbide CVD na ụlọ ọrụ semiconductor, dị ka tray MOCVD, RTP na oxide etching chamber ebe ọ bụ na silicon nitride nwere nnukwu ujo ujo ma nwee ike iguzogide plasma ume dị elu.
-Silicon carbide na-ejikarị na semiconductor na mkpuchi.

Ngwa

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