Nkọwa
Semicera's SiC Wafer Susceptors maka MOCVD (Metal-Organic Chemical Vapor Deposition) ka emebere iji gboo ihe achọrọ nke usoro ntinye akwụkwọ epitaxial. N'iji Silicon Carbide (SiC) dị elu dị elu, ndị na-ahụ maka ihe ndị a na-enye ogologo oge na arụmọrụ na-enweghị atụ na gburugburu okpomọkụ na gburugburu ebe obibi na-emebi emebi, na-eme ka ọganihu dị mma na nke ọma nke ihe semiconductor.
Akụkụ ndị bụ isi:
1. Ngwongwo ihe kacha eluEwubere site na SiC dị elu, ndị na-ahụ maka wafer anyị na-egosipụta arụmọrụ ọkụ pụrụiche na nguzogide kemịkal. Ngwongwo ndị a na-enyere ha aka iguzogide oke ọnọdụ nke usoro MOCVD, gụnyere okpomọkụ dị elu na gas na-emebi emebi, na-eme ka ogologo ndụ dịkwuo ogologo na ịrụ ọrụ a pụrụ ịdabere na ya.
2. Nkenkenke na ntinye akwụkwọ EpitaxialInjinia ziri ezi nke SiC Wafer Susceptors anyị na-eme ka nkesa otu okpomọkụ gafee n'elu wafer, na-eme ka uto epitaxial na-agbanwe agbanwe na nke dị elu. Nke a ziri ezi dị oke mkpa maka imepụta semiconductor nwere ezigbo ọkụ eletrik.
3. Enwetara Inye IkeIhe SiC siri ike na-enye ezigbo nguzogide iyi na nbibi, ọbụlagodi na mkpughe na-aga n'ihu na gburugburu usoro siri ike. Ọdịgidere a na-ebelata ugboro ole ngbanwe nke susceptor, na-ebelata oge nkwụsị na ụgwọ ọrụ.
Ngwa:
Semicera's SiC Wafer Susceptors maka MOCVD dabara nke ọma maka:
• Epitaxial uto nke ihe semiconductor
• Usoro MOCVD dị elu
• Mmepụta nke GaN, AlN, na semiconductors ndị ọzọ mejupụtara
• Ngwa nrụpụta semiconductor dị elu
Nkọwa bụ isi nke mkpuchi CVD-SIC:
Uru:
•Elu nkenke: Na-eme ka o doo anya na uto epitaxial dị elu na nke dị elu.
•Arụmọrụ na-adịte aka: Ọdịiche pụrụiche na-ebelata ugboro ugboro.
• Ọnụ-arụmọrụ: Na-ebelata ụgwọ ọrụ site na mbelata oge nkwụsị na mmezi.
•Ntughari: Customizable ka dabara dị iche iche MOCVD usoro chọrọ.
