SemiceraIhe mkpuchi seramiiki Silicon Carbidebụ mkpuchi nchebe dị elu nke ejiri ihe silicon carbide (SiC) siri ike na eyi na-eguzogide. A na-etinyekarị ihe mkpuchi ahụ n'elu nke mkpụrụ site na CVD ma ọ bụ PVD usoro naihe ndị dị na silicon carbide, na-enye ezigbo nguzogide corrosion kemịkalụ na nkwụsi ike dị elu. Ya mere, a na-eji mkpuchi mkpuchi silicon Carbide Ceramic eme ihe n'ọtụtụ akụkụ nke akụrụngwa nrụpụta semiconductor.
Na mmepụta nke semiconductor,mkpuchi SiCnwere ike iguzogide oke okpomọkụ dị elu ruo 1600 ° C, ya mere, a na-ejikarị Silicon Carbide Ceramic mkpuchi eme ihe dị ka ihe mkpuchi maka akụrụngwa ma ọ bụ ngwaọrụ iji gbochie mmebi na nnukwu okpomọkụ ma ọ bụ gburugburu gburugburu.
N'otu oge ahụ,silicon carbide seramiiki mkpuchinwere ike iguzogide nbibi nke acid, alkalis, oxides na ndị ọzọ chemical reagents, na nwere nnukwu corrosion iguzogide a dịgasị iche iche nke chemical bekee. Ya mere, ngwaahịa a dabara maka gburugburu corrosive dị iche iche na ụlọ ọrụ semiconductor.
Ọzọkwa, ma e jiri ya tụnyere ihe ndị ọzọ seramiiki, SiC nwere ikike ikuku dị elu ma nwee ike iduzi okpomọkụ nke ọma. Nke a na atụmatụ na-ekpebi na na semiconductor Filiks na-achọ kpọmkwem okpomọkụ akara, elu thermal conductivity nkeIhe mkpuchi seramiiki Silicon Carbidena-enyere aka ịgbasa ọkụ n'otu n'otu, gbochie ikpo oke mpaghara, ma hụ na ngwaọrụ ahụ na-arụ ọrụ na okpomọkụ kachasị mma.
| Njirimara anụ ahụ bụ isi nke mkpuchi CVD sic | |
| Ngwongwo | Uru a na-ahụkarị |
| Ọdịdị kristal | FCC β oge polycrystalline, tumadi (111) gbakwasara |
| Njupụta | 3.21g/cm³ |
| Isi ike | 2500 Vickers ike (ibu 500g) |
| ọka SiZe | 2 ~ 10μm |
| Ịdị ọcha kemịkalụ | 99.99995% |
| Ike ikpo ọkụ | 640 nk-1· K-1 |
| Sublimation okpomọkụ | 2700 ℃ |
| Ike Flexural | 415 MPa RT 4-isi |
| Modul nke Young | 430 Gpa 4pt ekwe, 1300 ℃ |
| Nrụpụta okpomọkụ | 300W·m-1· K-1 |
| Mgbasa ọkụ (CTE) | 4.5 × 10-6K-1 |
