Silicon carbide seramiiki chucks

Nkọwa dị mkpirikpi:

Ụgwọ nke ụlọ ọrụ WeiTai Energy Technology Co., Ltd. bụ onye na-ebute ụzọ nke seramiki semiconductor dị elu yana naanị onye nrụpụta na China nke nwere ike n'otu oge na-enye seramiiki silicon carbide dị ọcha (karịaMegharia ya SiC) na mkpuchi CVD SiC.Na mgbakwunye, ụlọ ọrụ anyị na-agba mbọ maka ubi seramiiki dị ka alumina, aluminum nitride, zirconia, na silicon nitride, wdg.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Efere SiC bụ ụdị ceramics 0 porosity, nke dabere na SiC ma gbanye ya na 2250 ℃.Ọdịnaya SiC karịrị 99.6%, ike na-ehulata karịa 410mpa na conductivity thermal bụ 140W / MK ọ bụ naanị seramiiki na-eguzogide HF, H2SO4 na corrosion acid ndị ọzọ siri ike.

Uru nke silicon carbide ceramics:

1, ọnụọgụ nke mgbasawanye ọkụ dị obere, dị nso na silicon;

2, ezigbo nguzogide iyi, ike siri ike nke abụọ naanị diamond;

3, mma thermal conductivity, elu okpomọkụ na-eguzogide na ngwa ngwa ikposa;

Silicon carbide chuck3

Nka nka

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