Nkọwa
Semicera's SiC mkpuchi graphite susceptors ka a na-emezi ya site na iji mkpụrụ graphite dị elu, nke ejiri Silicon Carbide (SiC) kpuchie nke ọma site na usoro nrụpụta ihe mkpuchi mmiri kemịkalụ (CVD). Nhazi ohuru a na-eme ka nguzogide pụrụ iche maka ujo okpomọkụ na mmebi kemịkalụ, na-agbatị ogologo ndụ nke SiC mkpuchi graphite susceptor ma na-ekwe nkwa arụmọrụ a pụrụ ịdabere na ya n'oge usoro nrụpụta semiconductor.
Akụkụ ndị dị mkpa:
1. Elu Thermal ConductivityIhe mkpuchi graphite mkpuchi SiC na-egosiputa nrụpụta ọkụ pụtara ìhè, nke dị oke mkpa maka ịgbasa ọkụ nke ọma n'oge nrụpụta semiconductor. Njirimara a na-ebelata gradients thermal n'elu wafer, na-akwalite nkesa otu okpomọkụ dị mkpa maka imezu ihe nke semiconductor chọrọ.
2. Kemịkalụ siri ike na mgbochi ọkụ ọkụIhe mkpuchi SiC na-enye nchebe dị egwu megide corrosion kemịkalụ na ujo ọkụ, na-ejigide iguzosi ike n'ezi ihe nke graphite susceptor ọbụna na gburugburu ebe nhazi siri ike. Nkwụsi ike a na-abawanye na-ebelata oge nkwụsị ma gbatịa ogologo ndụ, na-enye aka n'ịbawanye arụpụta ọrụ na ọnụ ahịa ọnụ ahịa na ụlọ ọrụ mmepụta ihe semiconductor.
3. Nhazi maka mkpa pụrụ icheEnwere ike ịhazi ndị na-ahụ maka eserese graphite nwere mkpuchi SiC iji mezuo ihe achọrọ na mmasị. Anyị na-enye nhọrọ dịgasị iche iche nke nhazi, gụnyere nhazi nha na ọdịiche dị na mkpuchi mkpuchi, iji hụ na mgbanwe nhazi na arụ ọrụ kachasị maka ngwa dị iche iche na usoro nhazi.
Ngwa:
NgwaSemicera SiC mkpuchi a na-eji n'ụdị dị iche iche nke nrụpụta semiconductor, gụnyere:
1. - LED mgbawa mmepụta
2. - Polysilicon Mmepụta
3. -Semiconductor Crystal Growth
4. -Silicon na SiC Epitaxy
5. - Oxidation na mgbasa ozi (TO&D)
Nkọwa nka nka:
