Silicon-Impregnated Silicon Carbide (SiC) Paddle na Wafer Carrier

Nkọwa dị mkpirikpi:

Silicon-Impregnated Silicon Carbide (SiC) Paddle na Wafer Carrier bụ ihe mejupụtara arụmarụ dị elu nke etolite site na itinye silicon n'ime matrix silicon carbide matrix recrystallized ma na-enweta ọgwụgwọ pụrụ iche. Ihe a na-ejikọta ike dị elu na oke okpomọkụ nke silicon carbide recrystallized na nkwalite arụmọrụ nke infiltration silicon, na-egosipụtakwa arụmọrụ dị mma n'okpuru ọnọdụ dị oke egwu. A na-ejikarị ya eme ihe n'ọhịa nke ọgwụgwọ okpomọkụ nke semiconductor, karịsịa na gburugburu ebe obibi na-achọ okpomọkụ dị elu, nrụgide dị elu na nkwụsi ike dị elu, ọ bụkwa ihe dị mma maka ịmepụta akụkụ ọgwụgwọ okpomọkụ na usoro mmepụta semiconductor.

 

 


Nkọwa ngwaahịa

Mkpado ngwaahịa

Nchịkọta ngwaahịa

NkeSilicon-Impregnated Silicon Carbide (SiC) Paddle na Wafer Carrieremebere ya iji mezuo ihe achọrọ nke ngwa nhazi thermal semiconductor. Emebere ya site na SiC dị ọcha ma kwalite site na impregnation silicon, ngwaahịa a na-enye nchikota pụrụ iche nke ịrụ ọrụ oke ọkụ, ezigbo ọkụ ọkụ, nguzogide corrosion, na ike nrụpụta pụtara ìhè.

Site na ijikọ sayensị ihe dị elu na nrụpụta nkenke, ihe ngwọta a na-eme ka arụmọrụ dị elu, ntụkwasị obi na ịdịte aka maka ndị na-emepụta semiconductor.

Atụmatụ igodo

1.Nguzogide oke okpomọkụ pụrụiche

Site na ebe mgbaze karịrị 2700 Celsius, ihe SiC kwụsiri ike na oke okpomọkụ. Silicon impregnation na-eme ka nkwụsi ike nke okpomọkụ ha dịkwuo elu, na-enye ha ohere iguzogide ogologo oge na okpomọkụ dị elu na-enweghị mmebi nhazi ma ọ bụ mmebi arụmọrụ.

2.Nrụpụta okpomọkụ dị elu

Nrụpụta okpomọkụ pụrụ iche nke SiC na-eme ka silicon na-eme ka nkesa ọkụ dị otu, na-ebelata nrụgide okpomọkụ n'oge usoro nhazi dị oke mkpa. Ihe onwunwe a na-agbatị ndụ akụrụngwa ma na-ebelata oge mmepụta ihe, na-eme ka ọ dị mma maka nhazi okpomọkụ dị elu.

3.Oxidation na nguzogide corrosion

Ngwunye silicon oxide siri ike na-etolite n'ụzọ nkịtị n'elu, na-enye nguzogide pụtara ìhè na oxidation na corrosion. Nke a na-eme ka ntụkwasị obi dị ogologo oge na gburugburu ebe arụ ọrụ siri ike, na-echebe ma ihe na ihe ndị gbara ya gburugburu.

4.Ike Mechanical dị elu yana nguzogide iyi

Sic-impregnated SiC nwere ọmarịcha ike mkpakọ ma na-eyi nguzogide, na-ejigide iguzosi ike n'ezi ihe nhazi ya n'okpuru ibu dị elu, ọnọdụ okpomọkụ dị elu. Nke a na-ebelata ihe ize ndụ nke mmebi metụtara iyi, na-ahụ na arụmọrụ na-agbanwe agbanwe karịa ogologo oge ojiji.

Nkọwapụta

Aha ngwaahịa

SC-RSiC-Si

Ihe onwunwe

Silicon Impregnation Silicon Carbide kọmpat (ịdị ọcha dị elu)

Ngwa

Akụkụ ọgwụgwọ okpomọkụ nke Semiconductor, akụkụ ihe nrụpụta Semiconductor

Ụdị nnyefe

Ahụ a kpụrụ akpụ (Sintered body)

Ihe mejupụtara Ngwongwo igwe Modul nke Young (GPa)

Na-ehulata Ike

(MPa)

Ihe mejupụtara (vol%) α-SiC α-SiC RT 370 250
82 18 800°C 360 220
Njupụta nnukwu (kg/m³) 3.02 x 103 1200°C 340 220
Okpomọkụ Celsius C 1350 Oke Poisson 0.18 (RT)
Ngwongwo ọkụ

Nrụpụta okpomọkụ

(W/ (m· K))

Ikike Okpomọkụ akọwapụtara

(kJ/ (kg·K))

Ọnụọgụ nke Thermal Mgbasawanye

(1/K)

RT 220 0.7 RT ~ 700C 3,4 x10-6
700°C 60 1.23 700 ~ 1200C 4,3 x10-6

 

Ọdịnaya adịghị ọcha ((ppm)

Ihe

Fe Ni Na K Mg Ca Cr

Mn

Zn Cu Ti Va Ai
Ọnụọgụgụ ọdịnaya 3 <2 <0.5 <0.1 <1 5 0.3 <0.1 <0.1 <0.1 <0.3 <0.3 25

Ngwa

Semiconductor Thermal nhazi:Ọ dị mma maka usoro dị ka nsị vapor kemịkalụ (CVD), uto epitaxial, na annealing, ebe njikwa okpomọkụ na ịdịte aka ihe dị oke mkpa.

   Ndị na-ebu Wafer & Paddle:Ezubere iji jide ma bufee wafer na nchekwa n'oge ọgwụgwọ okpomọkụ dị elu.

   gburugburu na-arụ ọrụ oke: Kwesịrị ekwesị maka ntọala chọrọ iguzogide okpomọkụ, mkpughe kemịkalụ, na nrụgide n'ibu.

 

Uru nke Sic-Impregnated SiC

Ngwakọta nke silicon carbide dị ọcha na teknụzụ impregnation silicon dị elu na-enye uru arụmọrụ na-enweghị atụ:

       Nkenkenke:Na-akwalite izi ezi na njikwa nke nhazi semiconductor.

       Nkwụsi ike:Na-eguzogide gburugburu ebe siri ike na-emebighị ọrụ.

       Ogologo ndụ:Na-agbatị ndụ ọrụ nke akụrụngwa nrụpụta semiconductor.

       arụmọrụ:Na-eme ka nrụpụta ọrụ dịkwuo mma site n'ịhụ nsonaazụ a pụrụ ịdabere na ya na na-agbanwe agbanwe.

 

Kedu ihe kpatara ịhọrọ Ngwọta SiC nke etinyere na silicon?

At Semicera, anyị bụ ọkachamara n'inye ihe ngwọta dị elu nke ahaziri maka mkpa nke ndị na-emepụta semiconductor. Silicon-Impregnated Silicon Carbide Paddle na Wafer Carrier na-enweta nnwale siri ike na mmesi obi ike iji mezuo ụkpụrụ ụlọ ọrụ. Site na ịhọrọ Semicera, ị ga-enweta ihe ndị na-egbu egbu emebere iji kwalite usoro nrụpụta gị yana kwalite ikike mmepụta gị.

 

Nkọwa nka nka

      Ihe mejupụtara:Silikoni carbide dị ọcha nke nwere impregnation silicon.

   Oke okpomoku na-arụ ọrụ:Ruo 2700 ° C.

   Nrụpụta okpomọkụ:Ọpụrụiche dị elu maka nkesa okpomọkụ otu.

Njirimara eguzogide:Oxidation, corrosion, na eyi na-eguzogide.

      Ngwa:Dakọtara na usoro nhazi okpomọkụ nke semiconductor dị iche iche.

 

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Kpọtụrụ anyị

Ị dịla njikere ibuli usoro nrụpụta semiconductor gị? KpọtụrụSemicerataa ka ịmatakwu banyere Silicon-Impregnated Silicon Carbide Paddle na Wafer Carrier.

      Email: sales01@semi-cera.com/sales05@semi-cera.com

      Ekwentị: + 86-0574-8650 3783

   Ebe:No.1958 Jiangnan Road, Ningbo High tech, Mpaghara, Zhejiang Province, 315201, China


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