TaC mkpuchi epitaxial wafera na-ejikarị akwadebe ngwaọrụ optoelectronic dị elu, ngwaọrụ ike, sensọ na mpaghara ndị ọzọ. Nke aihe na-ebu epitaxial waferna-ezo aka deposition nkeTaCmkpa film na mkpụrụ n'oge kristal ibu usoro na-etolite a wafer na kpọmkwem Ọdịdị na arụmọrụ maka ụdi ngwaọrụ nkwadebe.
A na-ejikarị teknụzụ vapor deposition (CVD) akwadebeTaC mkpuchi epitaxial wafer. Site n'imeghachi ihe ndị na-emepụta ihe ndị na-emepụta ígwè na ikuku carbon na okpomọkụ dị elu, enwere ike idobe ihe nkiri TaC n'elu mkpụrụ kristal. Ihe nkiri a nwere ike inwe ezigbo ọkụ eletrik, ngwa anya na akụrụngwa ma dị mma maka nkwadebe nke ngwaọrụ dị elu dị iche iche.
Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.
ya na enweghị TaC
Mgbe iji TaC (n'aka nri)
Ọzọkwa, Semicera'sNgwaahịa ndị nwere mkpuchi TaCna-egosipụta ndụ ọrụ ogologo oge yana nguzogide okpomọkụ dị elu ma e jiri ya tụnyereIhe mkpuchi SiC.Nyocha ụlọ nyocha egosila na anyịIhe mkpuchi TaCnwere ike na-arụ ọrụ mgbe niile na okpomọkụ ruo 2300 degrees Celsius maka ogologo oge. N'okpuru bụ ọmụmaatụ ụfọdụ nke ihe atụ anyị:
