Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.
Silicon carbide (SiC) bụ ihe dị mkpa na ọgbọ nke atọ nke semiconductor, mana ọnụego mkpụrụ ya bụ ihe na-egbochi uto ụlọ ọrụ. Mgbe nyochachara nke ọma na ụlọ nyocha Semicera, achọpụtara na TaC fesa na steeed enweghị ịdị ọcha na ịdị n'otu dị mkpa. N'ụzọ dị iche, usoro CVD na-eme ka ọkwa dị ọcha nke 5 PPM dị ọcha na ezigbo otu. Ojiji CVD TaC na-eme ka ọnụọgụ mkpụrụ nke silicon carbide wafers dị mma. Anyị na-anabata mkparịta ụkaIhe mgbanaka akụkụ atọ nke TaC mkpuchi iji belata ego nke wafers SiC.
ya na enweghị TaC
Mgbe iji TaC (n'aka nri)
Ọzọkwa, Semicera'sNgwaahịa ndị nwere mkpuchi TaCna-egosipụta ndụ ọrụ ogologo oge yana nguzogide okpomọkụ dị elu ma e jiri ya tụnyereIhe mkpuchi SiC.Nyocha ụlọ nyocha egosila na anyịIhe mkpuchi TaCnwere ike na-arụ ọrụ mgbe niile na okpomọkụ ruo 2300 degrees Celsius maka ogologo oge. N'okpuru bụ ọmụmaatụ ụfọdụ nke ihe atụ anyị:
