TaC mkpuchi graphite ndu mgbanakarụtụ aka na ntinye nke obere oyi akwa nketantalum carbiden'elu mgbanaka nduzi graphite iji meziwanye nkwụsi ike ya, oke okpomọkụ na nkwụsi ike. A na-emepụta ihe mkpuchi a n'elu mgbanaka nduzi graphite site na usoro dị ka ntinye ikuku anụ ahụ (PVD) ma ọ bụ ihe mkpuchi mmiri ọgwụ (CVD).
Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.
Akụkụ bụ isi nke mgbanaka ntuziaka graphite mkpuchi TaC gụnyere:
1. Mgbochi okpomọkụ dị elu: mkpuchi TaC nwere ezigbo nkwụsi ike dị elu ma nwee ike ịnọgide na-enwe nkwụsi ike na gburugburu okpomọkụ dị elu.
2. Yiri eguzogide: Nnukwu ike nke tantalum carbide mkpa oyi akwa na-enye mgbanaka nduzi mgbanaka dị mma na-eguzogide ma na-agbatị ndụ ọrụ ya.
3. Nkwụsi ike nke kemịkalụ: mkpuchi TaC nwere nkwụsi ike dị elu megide corrosion chemical, na-eme ka ọ dị mma maka ngwa na ụfọdụ mgbasa ozi na-emebi emebi.
4. Belata esemokwu: Mkpuchi TaC nwere ike belata esemokwu n'etiti mgbanaka ntuziaka graphite na ihe ndị ọzọ ma melite arụmọrụ nke akara igwe.
ya na enweghị TaC
Mgbe iji TaC (n'aka nri)
Ọzọkwa, Semicera'sNgwaahịa ndị nwere mkpuchi TaCna-egosipụta ndụ ọrụ ogologo oge yana nguzogide okpomọkụ dị elu ma e jiri ya tụnyereIhe mkpuchi SiC.Nyocha ụlọ nyocha egosila na anyịIhe mkpuchi TaCnwere ike na-arụ ọrụ mgbe niile na okpomọkụ ruo 2300 degrees Celsius maka ogologo oge. N'okpuru bụ ọmụmaatụ ụfọdụ nke ihe atụ anyị: