TaC Coted MOCVD Graphite Susceptor

Nkọwa dị mkpirikpi:

Emebere TaC Coated MOCVD Graphite Susceptor nke Semicera maka ịdịte aka dị elu yana nguzogide oke okpomọkụ, na-eme ka ọ zuo oke maka ngwa Epitaxy MOCVD. Nke a susceptor kwalite arụmọrụ na ịdị mma na Deep UV LED mmepụta. Emepụtara ya na nkenke, Semicera na-ahụ na arụmọrụ kachasị elu yana ntụkwasị obi na ngwaahịa ọ bụla.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Mkpuchi TaCbụ ihe mkpuchi ihe dị mkpa, nke a na-akwadokarị na ntọala graphite site na teknụzụ metal organic chemical vapor deposition (MOCVD). Ihe mkpuchi a nwere ihe ndị magburu onwe ya, dị ka isi ike dị elu, nkwụsi ike na-eyi nke ọma, nkwụsị okpomọkụ dị elu na nkwụsi ike nke kemịkal, ọ dịkwa mma maka ngwa injinia dị elu dị iche iche.

Teknụzụ MOCVD bụ teknụzụ uto ihe nkiri dị gịrịgịrị nke a na-ejikarị na-edobe ihe nkiri ngwakọta a chọrọ n'elu ala site n'imeghachi ihe ndị na-eme ka ihe ndị na-emepụta ígwè na-eji gas na-emeghachi omume na okpomọkụ dị elu. Mgbe ị na-akwadebeMkpuchi TaC, na-ahọpụta kwesịrị ekwesị metal organic precursors na carbon isi mmalite, ịchịkwa mmeghachi omume ọnọdụ na deposition parameters, a edo na ok film TaC nwere ike idobe na graphite base.

Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.

Mgbe afọ nke mmepe, Semicera emeriwo nkà na ụzụ nkeCVD TACna mgbalị nkwonkwo nke ngalaba R&D. Ọdịiche dị mfe ime na usoro uto nke SiC wafers, mana mgbe ejiri yaTaC, ihe dị iche dị ịrịba ama. N'okpuru ebe a bụ ntụnyere wafers nwere na enweghị TaC, yana akụkụ Simicer maka otu uto kristal.

Elu arụmọrụ tantalum carbide coating_ melite mmepụta mmepụta mmepụta ihe ma belata ụgwọ ọrụ na-egosi Foto

Akụkụ Tac maka uto otu kristal

Antiwear tantalum carbide coating_ Na-echebe akụrụngwa pụọ na eyi na corrosion Foto egosipụtara

Graphite nwere mgbanaka mkpuchi TaC

ya na enweghị TaC

Mgbe iji TaC (n'aka nri)

Ọzọkwa, Semicera'sNgwaahịa ndị nwere mkpuchi TaCna-egosipụta ndụ ọrụ ogologo oge yana nguzogide okpomọkụ dị elu ma e jiri ya tụnyereIhe mkpuchi SiC.Nyocha ụlọ nyocha egosila na anyịIhe mkpuchi TaCnwere ike na-arụ ọrụ mgbe niile na okpomọkụ ruo 2300 degrees Celsius maka ogologo oge. N'okpuru bụ ọmụmaatụ ụfọdụ nke ihe atụ anyị: