Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.
Site na ọbịbịa nke 8-inch silicon carbide (SiC) wafers, ihe ndị a chọrọ maka usoro semiconductor dị iche iche na-esiwanye ike, karịsịa maka usoro epitaxy ebe okpomọkụ nwere ike karịa 2000 degrees Celsius. Ihe nkpuchi ọdịnala, dị ka graphite nke ejiri silicon carbide kpuchie, na-agbadata na oke okpomọkụ ndị a, na-akpaghasị usoro epitaxy. Otú ọ dị, CVD tantalum carbide (TaC) na-edozi okwu a nke ọma, na-eguzogide okpomọkụ ruo 2300 degrees Celsius ma na-enye ndụ ọrụ ogologo oge. Kpọtụrụ Semicera's Tantalum Carbide TaC CVD mkpuchi Wafer Susceptorka inyochakwuo ihe ngwọta anyị dị elu.
ya na enweghị TaC
Mgbe iji TaC (n'aka nri)
Ọzọkwa, Semicera'sNgwaahịa ndị nwere mkpuchi TaCna-egosipụta ndụ ọrụ ogologo oge yana nguzogide okpomọkụ dị elu ma e jiri ya tụnyereIhe mkpuchi SiC.Nyocha ụlọ nyocha egosila na anyịIhe mkpuchi TaCnwere ike na-arụ ọrụ mgbe niile na okpomọkụ ruo 2300 degrees Celsius maka ogologo oge. N'okpuru bụ ọmụmaatụ ụfọdụ nke ihe atụ anyị:
