Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.
A na-eji ndị na-ebu wafer mkpuchi Tantalum carbide eme ihe n'ọtụtụ ebe na nhazi na njikwa wafer na usoro nrụpụta semiconductor. Ha na-enye nkwado na nchebe kwụsiri ike iji hụ na nchekwa, izi ezi na nkwụsi ike nke wafer n'oge usoro mmepụta. Ihe mkpuchi nke Tantalum carbide nwere ike ịgbatị ndụ ọrụ nke onye na-ebu ya, belata ọnụ ahịa, ma melite ogo na ntụkwasị obi nke ngwaahịa semiconductor.
Nkọwa nke tantalum carbide mkpuchi wafer carrier bụ nke a:
1. Nhọrọ ihe: Tantalum carbide bụ ihe na-arụ ọrụ nke ọma, ike siri ike, ebe mgbaze dị elu, nguzogide corrosion na ihe ndị dị mma na-arụ ọrụ, n'ihi ya, a na-eji ya eme ihe na usoro mmepụta semiconductor.
2. Mkpuchi mkpuchi: A na-etinye mkpuchi nke Tantalum carbide n'elu nke na-ebu wafer site na usoro mkpuchi pụrụ iche iji mepụta otu uwe na akwa mkpuchi tantalum carbide. Ihe mkpuchi a nwere ike inye nchebe ọzọ ma na-eyi nguzogide, ebe ọ na-enwe ezigbo conductivity thermal.
3. Ịdị nro na nkenke: Tantalum carbide mkpuchi mkpuchi wafer na-ebu ibu nwere ọkwa dị elu na nkenke, na-eme ka nkwụsi ike na izi ezi nke wafers n'oge usoro mmepụta ihe. Ịdị larịị na njedebe nke elu ụgbọ elu dị oke mkpa iji hụ na ịdị mma na arụmọrụ nke wafer.
4. Nkwụsi ike nke okpomọkụ: Tantalum carbide mkpuchi wafer na-ebu nwere ike ịnọgide na-enwe nkwụsi ike na ọnọdụ okpomọkụ dị elu na-enweghị nrụrụ ma ọ bụ ịtọpụ, na-eme ka nkwụsi ike na nkwụsị nke wafers na usoro okpomọkụ dị elu.
5. Nguzogide corrosion: Tantalum carbide mkpuchi nwere ezigbo nguzogide corrosion, nwere ike iguzogide mmebi nke kemịkalụ na ihe mgbaze, ma chebe onye na-ebu ya site na mmiri mmiri na gas corrosion.
ya na enweghị TaC
Mgbe iji TaC (n'aka nri)
Ọzọkwa, Semicera'sNgwaahịa ndị nwere mkpuchi TaCna-egosipụta ndụ ọrụ ogologo oge yana nguzogide okpomọkụ dị elu ma e jiri ya tụnyereIhe mkpuchi SiC.Nyocha ụlọ nyocha egosila na anyịIhe mkpuchi TaCnwere ike na-arụ ọrụ mgbe niile na okpomọkụ ruo 2300 degrees Celsius maka ogologo oge. N'okpuru bụ ọmụmaatụ ụfọdụ nke ihe atụ anyị:
