Tantalum Carbide mkpuchi pedestal nkwado efere

Nkọwa dị mkpirikpi:

Emebere Tantalum Carbide Susceptor Susceptor Plate nke Semicera mere maka ojiji na silicon carbide epitaxy na uto kristal. Ọ na-enye nkwado kwụsiri ike na ọnọdụ okpomọkụ dị elu, corrosive, ma ọ bụ nrụgide dị elu, dị mkpa maka usoro ndị a dị elu. A na-ejikarị eme ihe na ndị na-ebugharị nrụgide dị elu, ihe ọkụ ọkụ, na akụrụngwa kemịkalụ, ọ na-eme ka arụmọrụ usoro na nkwụsi ike. Teknụzụ mkpuchi mkpuchi ọhụrụ nke Semicera na-ekwe nkwa ịdị mma na ntụkwasị obi maka ngwa injinia na-achọ.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Tantalum carbide mkpuchi mkpuchi susceptor eferebụ ihe susceptor ma ọ bụ nkwado ihe owuwu nke ejiri obere oyi akwa kpuchietantalum carbide. Enwere ike ịmepụta mkpuchi a n'elu susceptor site na usoro dị ka ntinye ikuku anụ ahụ (PVD) ma ọ bụ nsị vapor deposition (CVD), na-enye ndị susceptor ihe ndị dị elu.tantalum carbide.

Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.

Mgbe afọ nke mmepe, Semicera emeriwo nkà na ụzụ nkeCVD TACna mgbalị nkwonkwo nke ngalaba R&D. Ọdịiche dị mfe ime na usoro uto nke SiC wafers, mana mgbe ejiri yaTaC, ihe dị iche dị ịrịba ama. N'okpuru ebe a bụ ntụnyere wafers nwere na enweghị TaC, yana akụkụ Simicer maka otu uto kristal.

Akụkụ bụ isi nke tantalum carbide kpuchiri efere nkwado ndabere gụnyere:

1. Nkwụsi ike dị elu: Tantalum carbide nwere nkwụsi ike dị elu dị elu, na-eme ka ihe nkwado ndabere nke mkpuchi dị mma maka mkpa nkwado na ebe ọrụ okpomọkụ dị elu.

2. Nkwụsi ike nke corrosion: Tantalum carbide mkpuchi nwere ezigbo nguzogide corrosion, nwere ike iguzogide chemical corrosion na oxidation, na ịgbatị ndụ ọrụ nke isi.

3. Ịdị ike dị elu ma na-eyi nkwụsi ike: Ịdị ike nke tantalum carbide mkpuchi na-enye nkwado ndabere nke efere dị mma nke na-eguzogide ọgwụ, nke kwesịrị ekwesị maka oge ndị na-achọ nkwụsị elu.

4. Nkwụsi ike nke kemịkalụ: Tantalum carbide nwere nkwụsi ike dị elu na ihe dị iche iche nke kemịkal, na-eme ka efere nkwado nke mkpuchi mkpuchi na-arụ ọrụ nke ọma na mpaghara ụfọdụ na-emebi emebi.

Elu arụmọrụ tantalum carbide coating_ melite mmepụta mmepụta ụlọ ọrụ mmepụta ihe ma belata ụgwọ ọrụ egosipụtara Image

Akụkụ Tac maka uto otu kristal

Antiwear tantalum carbide coating_ Na-echebe akụrụngwa pụọ na eyi na corrosion Foto egosipụtara

Graphite nwere mgbanaka mkpuchi TaC

ya na enweghị TaC

Mgbe iji TaC (n'aka nri)

Ọzọkwa, Semicera'sNgwaahịa ndị nwere mkpuchi TaCna-egosipụta ndụ ọrụ ogologo oge yana nguzogide okpomọkụ dị elu ma e jiri ya tụnyereIhe mkpuchi SiC.Nyocha ụlọ nyocha egosila na anyịIhe mkpuchi TaCnwere ike na-arụ ọrụ mgbe niile na okpomọkụ ruo 2300 degrees Celsius maka ogologo oge. N'okpuru bụ ọmụmaatụ ụfọdụ nke ihe atụ anyị: