Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.
Graphite bụ ihe dị oke ọkụ dị elu, mana ọ na-eme ka ọ dị mfe na okpomọkụ dị elu. Ọbụlagodi n'ime ọkụ na-ekpo ọkụ nke nwere gas inert, ọ ka nwere ike na-enweta oxidation nwayọ. Iji mkpuchi CVD tantalum carbide (TaC) nwere ike chebe mkpụrụ graphite nke ọma, na-enye otu nguzogide okpomọkụ dị ka graphite. TaC bụkwa ihe na-adịghị arụ ọrụ, nke pụtara na ọ gaghị emeghachi omume na gas dị ka argon ma ọ bụ hydrogen na okpomọkụ dị elu.AjujuTantalum Carbide CVD mkpuchi EPI Susceptor ugbua!
ya na enweghị TaC
Mgbe iji TaC (n'aka nri)
Ọzọkwa, Semicera'sNgwaahịa ndị nwere mkpuchi TaCna-egosipụta ndụ ọrụ ogologo oge yana nguzogide okpomọkụ dị elu ma e jiri ya tụnyereIhe mkpuchi SiC.Nyocha ụlọ nyocha egosila na anyịIhe mkpuchi TaCnwere ike na-arụ ọrụ mgbe niile na okpomọkụ ruo 2300 degrees Celsius maka ogologo oge. N'okpuru bụ ọmụmaatụ ụfọdụ nke ihe atụ anyị:
