Tantalum carbide (TaC) Mkpuchi Planetary Plate

Nkọwa dị mkpirikpi:

Site na ọbịbịa nke 8-inch silicon carbide (SiC) wafers, ihe ndị a chọrọ maka usoro semiconductor dị iche iche na-esiwanye ike, karịsịa maka usoro epitaxy ebe okpomọkụ nwere ike karịa 2000 degrees Celsius. Ihe nkpuchi ọdịnala, dị ka graphite nke ejiri silicon carbide kpuchie, na-agbadata na oke okpomọkụ ndị a, na-akpaghasị usoro epitaxy. Otú ọ dị, CVD tantalum carbide (TaC) na-edozi okwu a nke ọma, na-eguzogide okpomọkụ ruo 2300 degrees Celsius ma na-enye ndụ ọrụ ogologo oge. Kpọtụrụ Semicera's Tantalum carbide (TaC) Mkpuchi Planetary Plate iji chọpụtakwuo maka ngwọta anyị dị elu.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.

 

Mgbe afọ nke mmepe, Semicera emeriwo nkà na ụzụ nkeCVD TACna mgbalị nkwonkwo nke ngalaba R&D. Ọdịiche dị mfe ime na usoro uto nke SiC wafers, mana mgbe ejiri yaTaC, ihe dị iche dị ịrịba ama. N'okpuru ebe a bụ ntụnyere wafers nwere na enweghị TaC, yana akụkụ Simicer maka otu uto kristal.

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ya na enweghị TaC

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Mgbe iji TaC (n'aka nri)

Ọzọkwa, Semicera'sNgwaahịa ndị nwere mkpuchi TaCna-egosipụta ndụ ọrụ ogologo oge yana nguzogide okpomọkụ dị elu ma e jiri ya tụnyereIhe mkpuchi SiC.Nyocha ụlọ nyocha egosila na anyịIhe mkpuchi TaCnwere ike na-arụ ọrụ mgbe niile na okpomọkụ ruo 2300 degrees Celsius maka ogologo oge. N'okpuru bụ ọmụmaatụ ụfọdụ nke ihe atụ anyị:

 
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