Ihe ọkụkụ ọkụ maka uto kristal silicon carbide - tantalum carbide porous

Ihe ọkụkụ ọkụ maka uto kristal silicon carbide – porous tantalum carbide gosiputara onyonyo

Nkọwa dị mkpirikpi:

A na-ejikarị tantalum carbide porous eme ihe maka nhazi nke gas na-eme ka akụkụ nke gas, na-edozi gradient okpomọkụ, na-eduzi ntụziaka ihe onwunwe, ịchịkwa ntanye, wdg. dị iche iche eruba conductance.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Semicera na-enye mkpuchi tantalum carbide (TaC) pụrụ iche maka ihe dị iche iche na ndị na-ebu.Usoro mkpuchi nke Semicera na-eme ka mkpuchi tantalum carbide (TaC) nweta ịdị ọcha dị elu, nkwụsi ike dị elu na nnabata kemịkalụ dị elu, na-emeziwanye ogo ngwaahịa nke kristal SIC / GAN na akwa EPI.Ihe susceptor TaC nwere graphite), na ịgbatị ndụ nke isi ihe ndị na-emepụta ihe. Ojiji nke tantalum carbide TaC mkpuchi bụ iji dozie nsogbu ihu ma melite ogo nke kristal, na Semicera achọpụtala teknụzụ mkpuchi mkpuchi tantalum carbide (CVD), na-eru ọkwa dị elu nke mba ụwa.

Mgbe afọ nke mmepe, Semicera emeriwo nkà na ụzụ nkeCVD TACna mgbalị nkwonkwo nke ngalaba R&D. Ọdịiche dị mfe ime na usoro uto nke SiC wafers, mana mgbe ejiri yaTaC, ihe dị iche dị ịrịba ama. N'okpuru ebe a bụ ntụnyere wafers nwere na enweghị TaC, yana akụkụ Semicera maka otu uto kristal

Akụkụ Tac maka uto otu kristal

Antiwear tantalum carbide coating_ Na-echebe akụrụngwa pụọ na eyi na corrosion Foto egosipụtara

Graphite nwere mgbanaka mkpuchi TaC

ya na enweghị TaC

Mgbe iji TaC (n'aka nri)

Tụkwasị na nke ahụ, ndụ ọrụ nke ngwaahịa mkpuchi Semicera's TaC dị ogologo ma na-eguzogide ọgwụ dị elu karịa nke mkpuchi SiC. Mgbe ogologo oge data nyocha ụlọ nyocha gasịrị, TaC anyị nwere ike ịrụ ọrụ ogologo oge na oke 2300 Celsius. Ndị a bụ ụfọdụ n'ime ihe atụ anyị: