Ụgbọ mmiri Wafer

Nkọwa dị mkpirikpi:

Ụgbọ mmiri wafer bụ ihe ndị bụ isi na usoro mmepụta semiconductor. Semiera nwere ike ịnye ụgbọ mmiri wafer nke emebere ma mepụta maka usoro mgbasa ozi, nke na-arụ ọrụ dị mkpa n'ịmepụta sekit jikọtara ọnụ. Anyị kwenyesiri ike na ịnye ngwaahịa kachasị mma na ọnụ ahịa asọmpi ma na-atụ anya ịbụ onye mmekọ gị ogologo oge na China.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Uru

Nguzogide oxidation dị elu
Nguzogide corrosion mara mma
Ezigbo nguzogide abrasion
Ọnụ ọgụgụ dị elu nke conductivity okpomọkụ
Mmanya onwe onye, ​​obere njupụta
Isi ike dị elu
Nhazi ahaziri ahazi.

HGF (2)
HGF (1)

Ngwa

- Ubi na-eguzogide ọgwụ: ịhịa aka n'ahụ, efere, mmiri na-agbapụta ájá, mkpuchi cyclone, gbọmgbọm egweri, wdg ...
-Akụkụ dị elu: siC Slab, Quenching Furnace Tube, Radiant Tube, Crucible, Heat Element, Roller, Beam, Heat Exchanger, Cold Air Pipe, Burner Nozzle, Thermocouple Protection Tube, SiC ụgbọ mmiri, Kiln ụgbọ ala Structure, Setter, wdg.
-Silicon Carbide Semiconductor: SiC wafer ụgbọ mmiri, sic chuck, sic paddle, sic cassette, sic diffusion tube, wafer ndụdụ, mmiri ara ehi, ụzọ ụzọ, wdg.
-Silicon Carbide Seal Field: ụdị mgbanaka akara niile, ibu, ahịhịa, wdg.
-Ubi fotovoltaic: Cantilever Paddle, Grinding Barrel, Silicon Carbide Roller, wdg.
- Ubi batrị lithium

WAFER (1)

WAFER (2)

Njirimara anụ ahụ SiC

Ngwongwo Uru Usoro
Njupụta 3.21 g/cc Sink-ese n'elu na nha
Okpomọkụ akọwapụtara 0.66 J/g °K Igwe ọkụ laser gbara agba
Ike mgbanwe 450 MPa 560 MPa Ehulata isi 4, isi isi RT4, 1300°
Mgbaji siri ike 2.94 MPa m1/2 Microindentation
Isi ike 2800 Vicker, ibu 500 g
Modulus nke na-agbanwe agbanwe 450 GPa430 4 pt gbagọọ, RT4 pt gbagọọ, 1300 Celsius
Nha ọka 2-10 µm SEM

Njirimara Thermal nke SiC

Nrụpụta okpomọkụ 250 W/m °K Laser flash usoro, RT
Mgbasawanye okpomọkụ (CTE) 4.5 x 10-6 °K Okpomọkụ ụlọ ruo 950 Celsius C, silica dilatometer

Nka nka

Ihe Nkeji Data
RBSiC (SiSiC) NBSiC SSiC RSiC OsiC
Ọdịnaya SiC % 85 75 99 99.9 ≥99
Ọdịnaya silicon efu % 15 0 0 0 0
Oke ọrụ okpomọkụ 1380 1450 1650 1620 1400
Njupụta g/cm3 3.02 2.75-2.85 3.08-3.16 2.65-2.75 2.75-2.85
Mepee porosity % 0 13-15 0 15-18 7-8
Ike na-ehulata 20 ℃ Nna 250 160 380 100 /
Ehulata ike 1200 ℃ Nna 280 180 400 120 /
Modul nke elasticity 20 ℃ Gpa 330 580 420 240 /
Modul nke elasticity 1200 ℃ Gpa 300 / / 200 /
Thermal conductivity 1200 ℃ W/mK 45 19.6 100-120 36.6 /
Ọnụọgụ nke mgbasawanye thermal K-1X10-6 4.5 4.7 4.1 4.69 /
HV Kg/mm2 2115 / 2800 / /

Ihe mkpuchi silicon carbide nke CVD dị n'elu elu nke ngwaahịa seramiiki silicon carbide recrystallized nwere ike iru ịdị ọcha karịa 99.9999% iji gboo mkpa ndị ahịa na ụlọ ọrụ semiconductor.

Ụlọ ọrụ Semicera
Ụlọ ọrụ Semicera 2
Igwe eji eme ihe
Nhazi CNN, nhicha kemịkalụ, mkpuchi CVD
Ọrụ anyị

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