Ogwe njikwa waferbụ isi ihe eji eme ihe na usoro mmepụta semiconductor iji jikwaa, nyefee na ọnọdụwafer. Ọ na-enwekarị ogwe aka rọbọt, ihe njide na sistemu njikwa, nwere ikike mmegharị na nhazi nke ọma.Wafer ejikwa ogwe akaA na-ejikarị njikọ dị iche iche eme ihe na mmepụta semiconductor, gụnyere usoro usoro dị ka ịkwanye wafer, nhicha, ntinye ihe nkiri dị mkpa, etching, lithography na nyocha. Izi ezi ya, ntụkwasị obi na ike akpaaka dị mkpa iji hụ na ịdị mma, arụmọrụ na nkwụsi ike nke usoro mmepụta ihe.
Isi ọrụ nke ogwe njikwa wafer gụnyere:
1. Nyefe Wafer: Ogwe aka na-eji wafer na-enwe ike ịnyefe wafers n'ụzọ ziri ezi site n'otu ebe gaa na nke ọzọ, dị ka iwere wafers site na nchekwa nchekwa ma tinye ha na ngwaọrụ nhazi.
2. Nhazi na nhazi: Ogwe aka na-eji wafer na-enwe ike ịkwado na nhazi nke wafer iji hụ na nhazi na ọnọdụ ziri ezi maka nhazi nhazi ma ọ bụ nha nha.
3. Ịkụgide na ịtọhapụ: A na-ejikarị ihe eji ejide wafer na-ejigide ogwe aka nke nwere ike ijide wafers n'enweghị nsogbu ma hapụ ya mgbe ọ dị mkpa iji hụ na nnyefe na njikwa wafer dị mma.
4. Njikwa akpaaka: ogwe aka na-eji wafer nwere usoro nchịkwa dị elu nke nwere ike ịme usoro ihe omume a kara aka na-akpaghị aka, melite mmepụta mmepụta ma belata mmejọ mmadụ.
Njirimara na uru
1.Precise akụkụ na okpomọkụ kwụsie ike.
2.High kpọmkwem stiffness na magburu onwe thermal uniformity, ogologo oge ojiji adịghị mfe ekwe deformation.
3.It nwere ezigbo elu na mma na-eyi nguzogide, si otú ahụ na-ejizi mgbawa ahụ n'enweghị mmerụ ahụ.
4.Silicon carbide resistivity na 106-108Ω, na-abụghị magnetik, n'ahịrị na mgbochi ESD nkọwa nkọwa; Ọ nwere ike igbochi mkpokọta ọkụ eletrik dị n'elu mgbawa.
5.Good thermal conductivity, obere mgbasawanye ọnụọgụ.
