SiC na-eguzogide okpomọkụ dị elu jikọtara ya na bọọdụ ịwụsa Si3N4

Nkọwa dị mkpirikpi:

WeiTai Energy Technology Co., Ltd bụ onye na-ebute ụzọ na-ebubata ọkachamara na wafer na ihe oriri semiconductor dị elu.Anyị raara onwe anyị nye ịnye ngwaahịa dị elu, nke a pụrụ ịdabere na ya, na ihe ọhụrụ maka mmepụta semiconductor, ụlọ ọrụ fotovoltaic na mpaghara ndị ọzọ metụtara ya.

Ahịrị ngwaahịa anyị gụnyere ngwaahịa graphite nke SiC / TaC na ngwaahịa seramiiki, gụnyere ihe dị iche iche dị ka silicon carbide, silicon nitride, na aluminum oxide na wdg.

Dị ka onye na-ebubata ntụkwasị obi, anyị ghọtara mkpa ihe oriri na-emepụta na usoro mmepụta ihe, anyị na-agbakwa mbọ na-ebuga ngwaahịa ndị na-agbaso ụkpụrụ kachasị elu iji mezuo mkpa ndị ahịa anyị.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Silicon nitride jikọtara ya na silicon carbide kiln nwere njirimara nke ike dị elu nke okpomọkụ, ezigbo nguzogide ujo, nrụrụ dị mfe, nguzogide oxidation, nguzogide corrosion, ezigbo ọkụ ọkụ na ihe ndị ọzọ.

Ihe ngosi arụmọrụ isi

Ihe	Ndekọ ọkụ brik	Nkọwa nke Kiln	Index nke ngwaahịa akpụrụ akpụ
Porosity pụtara(%)	<16	<16	<14
Nnukwu njupụta(g/cm3)	2 2.65	2 2.65	2 2.68
Ike mkpakọ na ụlọ okpomọkụ(MPa)	2160	2170	2180
Ike na-ehulata na ụlọ okpomọkụ(1400X:) MPa	240	245	245
Ike na-ehulata okpomọkụ dị elu(1400r) MPa	250	250	250
Ọnụọgụ nke mgbasawanye thermal(110CTC)xioVC	<4.18	<4.18	<4.18
Thermal conductivity(1100C)	216	216	216
Refractories(°C )	1800	1800	1800
0.2 MPa Ọnọdụ okpomọkụ dị nro n'okpuru ibu(X:)	1600	1600	> 1700
Okpomọkụ kachasị arụ ọrụ(°C)	1550	1550	1550

A na-eji ngwaahịa ndị a na-eji seramiiki egweri, ngwaahịa aluminom dị elu, bọọlụ aluminom, ụlọ ọrụ mmepụta ihe, seramiiki eletrọnịkị, igwe eletriki eletrik dị elu, ihe dị ọcha, poselin kwa ụbọchị, nitride alloy na ceramics foam na ụlọ ọrụ ndị ọzọ.