Acha anụnụ anụnụ/green LED epitaxy

Nkọwa dị mkpirikpi:

Ụlọ ọrụ anyị na-enye ọrụ usoro mkpuchi SiC site na usoro CVD n'elu graphite, ceramics na ihe ndị ọzọ, nke mere na gas pụrụ iche nwere carbon na silicon na-emeghachi omume na okpomọkụ dị elu iji nweta mkpụrụ ndụ SiC dị ọcha, ụmụ irighiri ihe ndị a na-edebe n'elu ihe ndị a na-ekpuchi, na-akpụ oyi akwa mkpuchi SIC.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Isi atụmatụ:

1. Nguzogide oxidation dị elu:

Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.

2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye ikuku kemịkalụ n'okpuru ọnọdụ chlorination dị elu.

3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.

4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.

 Isi nkọwa nkemkpuchi CVD-SIC

Njirimara SiC-CVD

Ọdịdị kristal FCC β oge
Njupụta g/cm ³ 3.21
Isi ike Vickers isi ike 2500
Nha ọka μm 2 ~ 10
Ịdị ọcha kemịkalụ % 99,99995
Ike ikpo ọkụ J·kg-1 · K-1 640
Sublimation okpomọkụ 2700
Ike Felexural MPa (RT 4-isi) 415
Modul nke Young GPA (4pt gbagọọ, 1300 ℃) 430
Mgbasawanye okpomọkụ (CTE) 10-6K-1 4.5
Thermal conductivity (W/mK) 300

 

 
Epitaxy LED
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