CVD Silicon Carbide (SiC) mgbanaka mgbanaka bụ ihe pụrụ iche emere na Silicon Carbide (SiC) site na iji usoro ihe mkpuchi vapor (CVD). CVD Silicon Carbide (SiC) Etching Ring na-arụ ọrụ dị mkpa n'ọtụtụ ngwa ụlọ ọrụ mmepụta ihe, ọkachasị na usoro metụtara etching ihe. Silicon Carbide bụ ihe seramiiki pụrụ iche na nke dị elu mara maka njirimara ya pụtara ìhè, gụnyere isi ike dị elu, ezigbo ọkụ ọkụ na iguzogide gburugburu kemịkalụ siri ike.
Usoro nkwụnye ọkụ ọkụ nke kemịkalụ gụnyere ịdoba obere oyi akwa nke SiC n'elu mkpụrụ n'ime gburugburu ebe a na-achịkwa, na-ebute ihe dị ọcha dị elu na nke emeziri nke ọma. A maara CVD Silicon Carbide maka uwe ya na nnukwu microstructure, ike ọrụ dị mma yana nkwụsi ike ọkụ.
CVD Silicon Carbide (SiC) Etching mgbanaka bụ nke CVD Silicon Carbide, nke ọ bụghị naanị na-eme ka ịdịte aka dị mma, kamakwa ọ na-eguzogide corrosion kemịkalụ na mgbanwe okpomọkụ. Nke a na-eme ka ọ dị mma maka ngwa ebe nkenke, ntụkwasị obi na ndụ dị oke mkpa.
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Susceptor Uto Epitaxy
Silicon/silicon carbide wafer kwesịrị ịgafe ọtụtụ usoro a ga-eji na ngwaọrụ eletrọnịkị. Usoro dị mkpa bụ silicon / sic epitaxy, nke a na-ebu silicon / sic wafers na ntọala graphite. Uru pụrụ iche nke Semicera's silicon carbide-conated graphite base gụnyere ịdị ọcha nke ukwuu, mkpuchi otu, yana ogologo ndụ ọrụ. Ha nwekwara nnukwu nguzogide kemịkalụ na nkwụsi ike ọkụ.
LED Chip Mmepụta
N'oge nnukwu mkpuchi nke MOCVD reactor, mbara ala ma ọ bụ ihe na-ebu ibu na-ebugharị wafer mkpụrụ. Ịrụ ọrụ nke isi ihe na-enwe mmetụta dị ukwuu n'ịdị mma mkpuchi, nke na-emetụta ọnụ ọgụgụ nkwụsị nke mgbawa. Ihe mkpuchi silicon carbide nke Semicera na-abawanye nrụpụta nrụpụta nke wafer LED dị elu ma na-ebelata ngbanwe ogologo ogologo. Anyị na-ewetakwa ihe ndị ọzọ graphite maka ndị nrụpụta MOCVD niile a na-eji ugbu a. Anyị nwere ike iji mkpuchi silicon carbide kpuchie ihe fọrọ nke nta ka ọ bụrụ ihe ọ bụla, ọbụlagodi na dayameta akụrụngwa ruru 1.5M, anyị ka nwere ike iji silicon carbide kpuchie ya.
Ubi Semiconductor, Usoro Mgbasa Oxidation, wdg.
Na usoro semiconductor, usoro mgbasawanye oxidation chọrọ ịdị ọcha ngwaahịa dị elu, na Semicera anyị na-enye ọrụ mkpuchi omenala na CVD maka ọtụtụ akụkụ silicon carbide.
Foto na-esonụ na-egosi slurry silicon carbide slurry nke Semicea na silicon carbide oven tube nke a na-ehicha na 100.0-ọkwauzuzu na-adịghịime ụlọ. Ndị ọrụ anyị na-arụ ọrụ tupu mkpuchi. Ịdị ọcha nke carbide silicon anyị nwere ike iru 99.99%, ịdị ọcha nke mkpuchi sic karịrị 99.99995%