Mgbanaka CVD Silicon Carbide (SiC) nke Semicera na-enye bụ ihe dị mkpa na etching semiconductor, ọkwa dị mkpa na nrụpụta ngwaọrụ semiconductor. Ngwakọta nke mgbanaka CVD Silicon Carbide (SiC) ndị a na-eme ka usoro siri ike na nke na-adịgide adịgide nke nwere ike iguzogide ọnọdụ ọjọọ nke usoro etching. Ntube ikuku kemịkalụ na-enyere aka etolite akwa SiC dị oke ọcha, edo na nnukwu, na-enye mgbanaka ahụ ezigbo ike igwe, nkwụsi ike ọkụ na nguzogide corrosion.
Dị ka ihe bụ isi ihe na mmepụta semiconductor, CVD Silicon Carbide (SiC) Rings na-arụ ọrụ dị ka ihe mgbochi nchebe iji chebe iguzosi ike n'ezi ihe nke ibe semiconductor. Nhazi ya nke ọma na-eme ka edo edo na etching a na-achịkwa, nke na-enyere aka n'ịmepụta ngwaọrụ semiconductor dị mgbagwoju anya, na-enye arụmọrụ na ntụkwasị obi.
Iji ihe CVD SiC na-ewu ihe mgbanaka na-egosi ntinye aka na ịdị mma na arụmọrụ na mmepụta semiconductor. Ihe a nwere ihe pụrụ iche, gụnyere ịdị elu thermal conductivity, kemịkalụ kemịkalụ mara mma, na iyi na nguzogide corrosion, na-eme ka CVD Silicon Carbide (SiC) Rings bụrụ ihe dị mkpa na nchụso nke ziri ezi na arụmọrụ na usoro etching semiconductor.
Semicera's CVD Silicon Carbide (SiC) mgbanaka na-anọchite anya ngwọta dị elu n'ọhịa nke imepụta semiconductor, na-eji njirimara pụrụ iche nke vapor kemịkalụ echekwabara silicon carbide iji nweta usoro etching pụrụ ịdabere na ya na nke dị elu, na-akwalite ọganihu na-aga n'ihu nke teknụzụ semiconductor. Anyị na-agba mbọ ịnye ndị ahịa ngwaahịa dị mma yana nkwado teknụzụ ọkachamara iji gboo mkpa ụlọ ọrụ semiconductor maka ngwọta etching dị elu na nke ọma.
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Susceptor Uto Epitaxy
Silicon/silicon carbide wafer kwesịrị ịgafe ọtụtụ usoro a ga-eji na ngwaọrụ eletrọnịkị. Usoro dị mkpa bụ silicon / sic epitaxy, nke a na-ebu silicon / sic wafers na ntọala graphite. Uru pụrụ iche nke Semicera's silicon carbide-conated graphite base gụnyere ịdị ọcha nke ukwuu, mkpuchi otu, yana ogologo ndụ ọrụ. Ha nwekwara nnukwu nguzogide kemịkalụ na nkwụsi ike ọkụ.
LED Chip Mmepụta
N'oge nnukwu mkpuchi nke MOCVD reactor, mbara ala ma ọ bụ ihe na-ebu ibu na-ebugharị wafer mkpụrụ. Ịrụ ọrụ nke isi ihe na-enwe mmetụta dị ukwuu n'ịdị mma mkpuchi, nke na-emetụta ọnụ ọgụgụ nkwụsị nke mgbawa. Ihe mkpuchi silicon carbide nke Semicera na-abawanye nrụpụta nrụpụta nke wafer LED dị elu ma na-ebelata ngbanwe ogologo ogologo. Anyị na-ewetakwa ihe ndị ọzọ graphite maka ndị nrụpụta MOCVD niile a na-eji ugbu a. Anyị nwere ike iji mkpuchi silicon carbide kpuchie ihe fọrọ nke nta ka ọ bụrụ ihe ọ bụla, ọbụlagodi na dayameta akụrụngwa ruru 1.5M, anyị ka nwere ike iji silicon carbide kpuchie ya.
Ubi Semiconductor, Usoro Mgbasa Oxidation, wdg.
Na usoro semiconductor, usoro mgbasawanye oxidation chọrọ ịdị ọcha ngwaahịa dị elu, na Semicera anyị na-enye ọrụ mkpuchi omenala na CVD maka ọtụtụ akụkụ silicon carbide.
Foto na-esonụ na-egosi slurry silicon carbide slurry nke Semicea na silicon carbide oven tube nke a na-ehicha na 100.0-ọkwauzuzu na-adịghịime ụlọ. Ndị ọrụ anyị na-arụ ọrụ tupu mkpuchi. Ịdị ọcha nke carbide silicon anyị nwere ike iru 99.99%, ịdị ọcha nke mkpuchi sic karịrị 99.99995%.