Ụlọ ọrụ anyị na-enyemkpuchi SiCusoro ọrụ n'elu graphite, ceramics na ihe ndị ọzọ site CVD usoro, nke mere na pụrụ iche gas nwere carbon na silicon nwere ike meghachi omume na elu okpomọkụ iji nweta elu-ọcha Sic ụmụ irighiri, nke nwere ike na-edebe n'elu nke mkpuchi ihe na-etolite a.oyi akwa mkpuchi SiCmaka epitaxy barel ụdị hy pnotic.
Isi atụmatụ:
1 .High ịdị ọcha SiC mkpuchi graphite
2. Nguzogide okpomọkụ kachasị elu & thermal uniformity
3. Ọ dị mmaSiC crystal kpuchiemaka elu dị larịị
4. Nnukwu ogologo oge megide ihicha kemịkalụ
Isi nkọwa nkemkpuchi CVD-SIC
| Njirimara SiC-CVD | ||
| Ọdịdị kristal | FCC β oge | |
| Njupụta | g/cm ³ | 3.21 |
| Isi ike | Vickers isi ike | 2500 |
| Nha ọka | μm | 2 ~ 10 |
| Ịdị ọcha kemịkalụ | % | 99,99995 |
| Ike ikpo ọkụ | J·kg-1 · K-1 | 640 |
| Sublimation okpomọkụ | ℃ | 2700 |
| Ike Felexural | MPa (RT 4-isi) | 415 |
| Modul nke Young | GPA (4pt gbagọọ, 1300 ℃) | 430 |
| Mgbasawanye okpomọkụ (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W/mK) | 300 |
