SiC Pin Trays maka Usoro Etching ICP na ụlọ ọrụ LED

SiC Pin Trays maka Usoro Etching ICP n'ime ihe osise LED egosipụtara

Nkọwa dị mkpirikpi:

Semicera's SiC Pin Trays maka usoro ICP Etching na ụlọ ọrụ LED ka emebere ya iji kwalite arụmọrụ yana izi ezi na ngwa etching. Emere site na silicon carbide dị elu, trays pin ndị a na-enye ezigbo nkwụsi ike nke okpomọkụ, nguzogide kemịkalụ, na ike igwe. Dị mma maka ọnọdụ na-achọsi ike nke usoro nrụpụta LED, Semicera's SiC pin trays na-eme ka etching otu, belata mmetọ, ma melite ntụkwasị obi usoro zuru oke, na-enye aka na mmepụta LED dị elu.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Nkọwa ngwaahịa

Ụlọ ọrụ anyị na-enye ọrụ usoro mkpuchi SiC site na usoro CVD n'elu graphite, ceramics na ihe ndị ọzọ, nke mere na gas pụrụ iche nwere carbon na silicon na-emeghachi omume na okpomọkụ dị elu iji nweta mkpụrụ ndụ SiC dị ọcha, ụmụ irighiri ihe ndị a na-edebe n'elu ihe ndị a na-ekpuchi, na-akpụ oyi akwa mkpuchi SIC.

Isi atụmatụ:

1. Nguzogide oxidation dị elu:

Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.

2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye ikuku kemịkalụ n'okpuru ọnọdụ chlorination dị elu.

3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.

4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.

Nkọwa isi nke mkpuchi CVD-SIC

Njirimara SiC-CVD
Ọdịdị kristal	FCC β oge
Njupụta	g/cm ³	3.21
Isi ike	Vickers isi ike	2500
Nha ọka	μm	2 ~ 10
Ịdị ọcha kemịkalụ	%	99,99995
Ike ikpo ọkụ	J·kg-1 · K-1	640
Sublimation okpomọkụ	℃	2700
Ike Felexural	MPa (RT 4-isi)	415
Modul nke Young	GPA (4pt gbagọọ, 1300 ℃)	430
Mgbasawanye okpomọkụ (CTE)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300