Onye na-ebu nhazi PSS maka nnyefe semiconductor wafer

Nkọwa dị mkpirikpi:

Silicon carbide bụ ụdị ceramik ọhụrụ nwere arụmọrụ dị oke ọnụ yana akụrụngwa akụrụngwa mara mma.N'ihi njirimara dị ka ike dị elu na ike siri ike, oke okpomọkụ na-eguzogide, nnukwu okpomọkụ conductivity na chemical corrosion resistance, Silicon Carbide nwere ike ọ fọrọ nke nta ka ọ ghara iguzogide ọgwụ niile.Ya mere, a na-eji SiC eme ihe na ngwuputa mmanụ, kemịkalụ, igwe na ikuku, ọbụna ike nuklia na ndị agha nwere ihe ha chọrọ na SIC.Ụfọdụ ngwa nkịtị anyị nwere ike ịnye bụ mgbanaka akara maka mgbapụta, valvụ na ihe agha nchebe wdg.

Anyị na-enwe ike chepụta na rụpụta dị ka gị kpọmkwem akụkụ na ezi mma na ezi uche nnyefe oge.

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Nkọwa ngwaahịa

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Nkọwa ngwaahịa

Ụlọ ọrụ anyị na-enye ọrụ usoro mkpuchi SiC site na usoro CVD n'elu graphite, ceramics na ihe ndị ọzọ, nke mere na gas pụrụ iche nwere carbon na silicon na-emeghachi omume na okpomọkụ dị elu iji nweta mkpụrụ ndụ SiC dị ọcha, ụmụ irighiri ihe ndị a na-edebe n'elu ihe ndị a na-ekpuchi, na-akpụ oyi akwa mkpuchi SIC.

Isi atụmatụ:

1. Nguzogide oxidation dị elu:

Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.

2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye ikuku kemịkalụ n'okpuru ọnọdụ chlorination dị elu.

3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.

4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.

Nkọwa isi nke mkpuchi CVD-SIC

Njirimara SiC-CVD
Ọdịdị kristal	FCC β oge
Njupụta	g/cm ³	3.21
Isi ike	Vickers isi ike	2500
Nha ọka	μm	2 ~ 10
Ịdị ọcha kemịkalụ	%	99,99995
Ike ikpo ọkụ	J·kg-1 · K-1	640
Sublimation okpomọkụ	℃	2700
Ike Felexural	MPa (RT 4-isi)	415
Modul nke Young	GPA (4pt gbagọọ, 1300 ℃)	430
Mgbasawanye okpomọkụ (CTE)	10-6K-1	4.5
Thermal conductivity	(W/mK)	300