Nkọwa
Ụlọ ọrụ anyị na-enyemkpuchi SiCusoro ọrụ site na usoro CVD n'elu graphite, ceramics na ihe ndị ọzọ, nke mere na gas pụrụ iche nwere carbon na silicon na-emeghachi omume na okpomọkụ dị elu iji nweta mkpụrụ ndụ SiC dị ọcha, ụmụ irighiri ihe ndị a na-edebe n'elu ihe ndị a na-ekpuchi, na-akpụ.oyi akwa mkpuchi SIC.
Isi atụmatụ
1. Nguzogide oxidation dị elu:
Nguzogide oxidation ka dị ezigbo mma mgbe okpomọkụ dị elu dị ka 1600 C.
2. Nnukwu ịdị ọcha: nke a na-eme site na ntinye ikuku kemịkalụ n'okpuru ọnọdụ chlorination dị elu.
3. Nguzogide nbibi: elu ike, kọmpat elu, ezigbo ahụ.
4. Nguzogide corrosion: acid, alkali, nnu na organic reagents.
Nkọwa isi nke mkpuchi CVD-SIC
| Njirimara SiC-CVD | ||
| Ọdịdị kristal | FCC β oge | |
| Njupụta | g/cm ³ | 3.21 |
| Isi ike | Vickers isi ike | 2500 |
| Nha ọka | μm | 2 ~ 10 |
| Ịdị ọcha kemịkalụ | % | 99,99995 |
| Ike ikpo ọkụ | J·kg-1 · K-1 | 640 |
| Sublimation okpomọkụ | ℃ | 2700 |
| Ike Felexural | MPa (RT 4-isi) | 415 |
| Modul nke Young | GPA (4pt gbagọọ, 1300 ℃) | 430 |
| Mgbasawanye okpomọkụ (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W/mK) | 300 |
Nkọwapụta Ụlọ ọrụ
Semicera Energy bụ otu n'ime ndị na-emepụta na ndị na-ebunye ihe mkpuchi mkpuchi epitaxial silicon carbide na China.Isi ngwaahịa anyị gụnyere: Silicon carbide etch plates, silicon carbide boat trailers, silicon carbide wafer ụgbọ mmiri (PV & Semiconductor), silicon carbide furnace tubes, silicon carbide cantilever paddles, silicon carbide chucks, silicon carbide beams, yana CVD SiC mkpuchi na. Ihe mkpuchi TaC.
A na-eji ngwaahịa ndị a eme ihe na semiconductor na ụlọ ọrụ fotovoltaic, dị ka uto kristal, epitaxy, etching, nkwakọ, mkpuchi na ihe mkpuchi ọkụ ọkụ.Zụrụ SIC mkpuchi epitaxial pallets nwere ọnụ ala dị ala site na ụlọ ọrụ anyị.Anyị nwere akara nke anyị ma anyị na-akwado nnukwu.Ọ bụrụ na ị nwere mmasị na ngwaahịa anyị, anyị ga-enye gị ọnụ ala dị ọnụ ala.Nnọọ na ngwaahịa mbelata kacha ọhụrụ anyị.
Ụlọ ọrụ anyị nwere ngwá ọrụ mmepụta ihe zuru oke dị ka ịkpụzi, sintering, nhazi, mkpuchi mkpuchi, wdg, nke nwere ike mezue njikọ niile dị mkpa nke mmepụta ngwaahịa ma nwee njikwa dị elu nke àgwà ngwaahịa;Enwere ike ịhọrọ atụmatụ mmepụta kachasị mma dị ka mkpa nke ngwaahịa ahụ si dị, na-eme ka ọnụ ahịa dị ala ma na-enye ndị ahịa ngwaahịa ndị ọzọ asọmpi;Anyị nwere ike na-agbanwe agbanwe na ịrụ ọrụ nke ọma ịhazi mmepụta nke dabere na ihe nnyefe chọrọ yana njikọ na usoro njikwa usoro ntanetị, na-enye ndị ahịa oge nnyefe ngwa ngwa na karịa.
Akụrụngwa
