Na ngalaba teknụzụ eletrọnịkị taa, ihe ndị semiconductor na-arụ ọrụ dị oke mkpa.N'ime ha, silicon carbide (SiC) dị ka a wide band gap semiconductor ihe, na ya magburu onwe arụmọrụ uru, dị ka elu ndakpọ electric ubi, elu saturation ọsọ, elu thermal conductivity, wdg, na-eji nwayọọ nwayọọ na-aghọ ndị na-elekwasị anya nke ndị nchọpụta na injinia.Silikoni carbide epitaxial disk, dị ka akụkụ dị mkpa na ya, egosila nnukwu ngwa ngwa.
一, arụ ọrụ diski epitaxial: uru zuru oke
1. Ultra-high breakdown electric field: jiri ya tụnyere omenala silicon ihe, mmebi eletrik nke silicon carbide bụ ihe karịrị 10 ugboro.Nke a pụtara na n'okpuru otu ọnọdụ voltaji, ngwaọrụ eletrọnịkị na-eji silicon carbide epitaxial disks nwere ike iguzogide mmiri dị elu, si otú ahụ na-emepụta ngwa eletrik dị elu, nke dị elu, nke dị elu.
2. Ọsọ saturation dị elu: ọsọ saturation nke silicon carbide karịrị ugboro 2 nke silicon.Na-arụ ọrụ na oke okpomọkụ na oke ọsọ, silicon carbide epitaxial disk na-arụ ọrụ nke ọma, nke na-eme ka nkwụsi ike na ntụkwasị obi nke ngwaọrụ eletrọnị dịkwuo mma.
3. Ịrụ ọrụ nke ọma na-arụ ọrụ nke ọma: ihe ọkụ ọkụ nke silicon carbide bụ ihe karịrị ugboro 3 nke silicon.Njirimara a na-enye ohere ngwaọrụ eletrọnịkị ka ọ ka mma ịgbasa okpomọkụ n'oge arụ ọrụ ike dị elu na-aga n'ihu, si otú a na-egbochi ikpo oke ọkụ na imeziwanye nchekwa ngwaọrụ.
4. Nkwụsi ike nke kemịkal dị mma: na gburugburu ebe dị egwu dị ka okpomọkụ dị elu, nrụgide dị elu na radieshon siri ike, arụmọrụ nke silicon carbide ka na-akwụsi ike dị ka ọ dị na mbụ.Njirimara a na-enyere silicon carbide epitaxial disk aka ịnọgide na-arụ ọrụ nke ọma n'ihu gburugburu ebe mgbagwoju anya.
二, usoro mmepụta: ejiri nlezianya kpụrụ ya
Usoro bụ isi maka imepụta SIC epitaxial disk gụnyere ntinye anụ ahụ vepor deposition (PVD), kemịkalụ vapor deposition (CVD) na uto epitaxial.Nke ọ bụla n'ime usoro ndị a nwere njirimara nke ya ma chọọ njikwa ziri ezi nke paramita dị iche iche iji nweta nsonaazụ kacha mma.
1. Usoro PVD: Site evaporation ma ọ bụ sputtering na ụzọ ndị ọzọ, SiC lekwasịrị anya na-edebe na mkpụrụ na-etolite a film.Ihe nkiri a kwadebere site na usoro a nwere ịdị ọcha dị elu na ezigbo crystallinity, ma mmepụta ọsọ ọsọ na-adị nwayọọ.
2. CVD usoro: Site cracking na silicon carbide isi iyi gas na elu okpomọkụ, ọ na-edebe na mkpụrụ na-etolite a mkpa film.Ọkpụrụkpụ na ịdị n'otu nke ihe nkiri a kwadebere site na usoro a bụ nke a na-achịkwa, ma ịdị ọcha na kristal adịghị mma.
3. Epitaxial uto: uto nke SiC epitaxial oyi akwa na monocrystalline silicon ma ọ bụ ndị ọzọ monocrystalline ihe site kemịkalụ vepor ntinye usoro.Epitaxial oyi akwa nke a kwadebere site na usoro a nwere ezigbo ndakọrịta na arụmọrụ dị mma na ihe ndị na-emepụta ihe, ma ọnụ ahịa ya dị oke elu.
三、Atụmanya ngwa: Mee ka ọdịnihu pụta ìhè
Site na mmepe nke teknụzụ elektrọn ike na-aga n'ihu na mmụba na-abawanye maka ịrụ ọrụ dị elu yana ngwaọrụ eletrọnịkị dị elu, silicon carbide epitaxial disk nwere atụmanya ngwa sara mbara na nrụpụta ngwaọrụ semiconductor.A na-eji ya eme ihe n'ịmepụta ngwaọrụ semiconductor dị elu nke dị elu, dị ka ọkụ eletrik eletrik, inverters, rectifiers, wdg. Tụkwasị na nke ahụ, a na-ejikwa ya na sel anyanwụ, LED na ubi ndị ọzọ.
Site na uru arụmọrụ ya pụrụ iche yana nkwalite na-aga n'ihu nke usoro nrụpụta, silicon carbide epitaxial disk ji nke nta nke nta na-egosi nnukwu ikike ya na mpaghara semiconductor.Anyị nwere ihe mere anyị ga-eji kwere na n'ọdịnihu nke sayensị na nkà na ụzụ, ọ ga-arụ ọrụ dị mkpa karị.
Oge nzipu: Nov-28-2023